摘要
为了解决尺蠖电机难以兼顾高速和高精度的问题,提出一种基于导通角调节的驱动方法,对V形双足式尺蠖电机的机电耦合模型、驱动方法和运动机理等进行了研究。根据设计的V形双足式尺蠖电机结构建立其机电耦合模型,基于导通角调节确定尺蠖电机驱动方法。分析V形双足式尺蠖电机运动机理,并搭建实验平台进行实验验证。实验结果表明:在一定允许误差的范围内,实验结果与理论推导相符,验证了驱动方法的合理性与可行性。引入导通角,最小步距由500 nm降低到330 nm,降低了34%;通过同时调节频率f和导通角α,可使电机具备0.5 mm/s的最大驱动速度和330 nm的最小步距的能力。引入变量导通角α,成功实现了电机步距和驱动速度的独立调节。
To solve the balancing problems of high speed and high precision,a drive method based on conduction angle adjustment was proposed.The electromechanical coupling model,drive method,and motion mechanism of a V-shaped double-foot-worm motor were studied.Firstly,the electromechanical coupling model of a V-shaped biped inchworm motor was established according to the designed structure of the V-shaped biped inchworm motor.Then,the driving method based on the conduction angle adjustment was determined.Then,the motion mechanism of the V-shaped biped inchworm motor was analyzed.Finally,an experimental platform was built for experimental verification.The experimental results adequately agree with the theoretical derivation within a certain allowable error range,verifying the rationality and feasibility of the driving method.With the introduction of the conduction angle,the minimum step distance is reduced from 500 nm to 300 nm,a reduction of approximately 34%.By adjusting the frequency f and the conduction angle concurrently,the motor achieves a driving speed of 0.5 mm/s and a 330 nm positioning accuracy at the same time.By introducing a variable conduction angle,the motor step distance is successfully realized and the driving speed is adjusted independently.
作者
赵勃
史维佳
王丙泉
亓雪
谭久彬
ZHAO Bo;SHI Wei-jia;WANG Bing-quan;QI Xue;TAN Jiu-bin(Center of Ultra-precision Optoelectronic Instrument Engineering,Harbin Institute of Technology,Harbin 150080,China;Key Lab of Ultra-precision Intelligent Instrumentation(Harbin Institute of Technology),Ministry of Industry and Information Technology,Harbin 150080,China)
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2020年第2期363-371,共9页
Optics and Precision Engineering
基金
国家重点研发计划重大科学仪器设备开发专项课题(No.2018YFF01012003)
中国博士后科学基金资助项目(No.2018M640294)。
关键词
双足尺蠖电机
机电耦合模型
驱动方法
运动机理
biped inchworm motor
electromechanical coupling model
driving method
motion mechanism
