摘要
研制了一种采用电流镜积分读出电路和相关双采样电路的X射线CMOS图像传感器(NEW-X-IS),传感器像元由采用CMOS工艺的光电二极管实现,光电二极管产生的光电流通过电流镜放大后在像元外的电容上积分,经相关双采样电路抑制噪声后,由CMOS移位寄存器和多路开关电路输出视频信号。对采用2μm CMOS工艺研制的64位实验线阵进行参数测试,结果表明NEW-X-IS具有较小的非均匀性、较低的暗噪声、较大的单位面积响应度、较高的输出电压和较宽的动态范围。将其应用于一个实验系统中,得到了不同密度、不同尺寸材料的视频信号波形。
An X-ray CMOS image sensor（New-X-IS） using current mirroring integration readout circuit and correlated double sampling circuit is developed.The sensor pixel is implemented by a photodiode using CMOS technique.The current generated by optical excitation is mirrored and magnified in an integral capacitor outside the sensor pixel.The noise is suppressed by correlated double sampling circuit,and the video signal is exported by CMOS shift register and multiplexer output stages.The 64 pixel-line-array image sensor is fabricated by 2 μm CMOS technique,and the performance parameters of New-X-IS are measured. The measurement result shows that new-X-IS has some characteristics of less non-uniformity, lower noise of dark output voltage,larger unit area responsivity, higher output voltage and wider dynamic range. Applying new-X-IS to an experiment system,the video signal waveforms of different densities and different material sizes are obtained.
出处
《半导体光电》
EI
CAS
CSCD
北大核心
2007年第1期51-53,142,共4页
Semiconductor Optoelectronics
基金
国家自然科学基金资助项目(60077025)
关键词
电流镜积分读出电路
相关双采样电路
参数测试
视频信号波形
current mirroring integration readout circuit
correlated double sampling circuit
performance parameters measurement
video signal waveform
