摘要
采用大激励极板的螺旋型膜开关在保持优异的高频特性的同时 ,可以获得较低的阈值电压。但是对这种结构的设计缺乏足够理论分析。文中将在 Ansys软件数值求解的基础上 ,研究缺口尺寸和开关阈值电压的关系 。
Low-loss membrane switches are reported that utilize serpentine spring folded su pensions with large area actuators to ac hieve low threshold voltage while mainta ining excellent high-frequency performan c e. But the design of this structure was lack of sufficient theoretical analysis and the mechanism of this design was di m. In this paper, the sensitivity of s w itching threshold voltage to gap size ba sed on numerical solution was discussed in detail with the help of Ansys softwar e. The results are expected to contribute to des ign switches with low threshold voltage.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
2003年第4期500-503,共4页
Research & Progress of SSE
