摘要
面向宽量程真空传感器研发阶段的可靠性优化,设计低温步进、高温步进、快速温变、振动步进和综合环境5项可靠性强化试验,并搭建真空对比测试系统。在经历每项可靠性强化试验后,对比试验获得被测传感器和标准传感器测试不同真空度的示值。真空测试和可靠性分析结果表明,被测传感器的全温区温度可靠性较好,但振动步进试验使1只传感器发生故障,电离灯丝断裂、引线针与陶瓷基座间的钎焊裂纹、可伐环与陶瓷基座间的钎焊孔洞是被测传感器试验和使用故障的主要原因。从优化管芯结构设计、自动化灯丝焊接工艺、优化钎焊工艺等方面提出传感器可靠性优化建议。此外,虽然被测传感器相对标准传感器的测量误差较大,但被测传感器之间的输出一致性较好,可从后端补偿上提高传感器测量精度。
Five reliability enhancement tests are designed for developing the wide-range vacuum sensor,including low temperature stepping,high temperature stepping,rapid temperature change,vibration stepping and comprehensive test,and a vacuum comparison test system is built.After each reliability enhancement test,the indication values of different vacuum tested by the tested sensor and the standard sensor were obtained.The results of the vacuum test and reliability analysis show that the temperature reliability of the tested sensors is good,but one sensor failed in the vibration stepping test.The main causes of sensor failure in test and use are the fracture of ionization filament,the brazing crack between the lead pin and ceramic base,and the brazing hole between Kovar ring and ceramic base,etc.Some optimization suggestions are put forward from the aspects of optimizing the structure design of the tube core,automatic filament welding process and optimizing brazing process,etc.In addition,the relative error of the tested sensors is larger,but the output consistency between the tested sensors is better,so the measurement accuracy of the tested sensor can be improved from the back-end compensation.
作者
杜晓辉
刘帅
朱敏杰
王美聪
林红
DU Xiaohui;LIU Shuai;ZHU Minjie;WANG Meicong;LIN Hong(Instrumentation Technology and Economy Institute,Beijing 100055,China;Guangzhou University,Guangzhou 510000,China;Chengdu Guoguang Electric Co.,Ltd.,Chengdu 610000,China)
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2022年第10期745-753,共9页
Chinese Journal of Vacuum Science and Technology
基金
高性能真空监测仪表可靠性强化关键技术项目(2018YFB2003704)
过程仪表高动态性能传感元件设计项目(2020YFB2009203)
基于玻璃微结构阵列的光学调制器基础问题研究项目(62004079)。
关键词
宽量程真空传感器
可靠性强化试验
对比测试
故障分析
优化建议
Wide-range vacuum sensor
Reliability enhancement test
Comparative test
Fault analysis
Optimization suggestions
