摘要
微纳谐振器与众多物理场的相互作用是被广泛研究的课题。当前,微纳谐振器本身模态之间的相互作用逐渐成为研究热点,通过参数泵浦实现的动力学模态耦合尤其引人关注。以一种嵌套环式微机械谐振器为研究平台,开展了基于静电参数泵浦的动力学耦合操控研究,并采用多尺度摄动法对动力学耦合过程进行解析和模拟,计算得到了比以往研究更加精细的耦合强度公式,加深了对动力学耦合物理过程的理解。为动力学耦合的下一步应用打下了坚实基础。
The interactions of micro-and nano-mechanical resonators with various physical fields have been researched extensively.Recently,the study of modal coupling mechanisms in such devices has received significant attention.Among them,the dynamical modal coupling by introducing a parametric pump is of extraordinary interest.This study uses a micro-disk resonator as a testbed to study the electrostatically pumped dynamical coupling.The multiple-time-scale perturbation method is introduced for the first time to interpret and simulate the dynamical coupling.Based on this,a theoretical model for the dynamical coupling strength that is more accurate than any other study has been provided.This study gives a much clearer physical picture for the dynamical coupling process,which greatly enhanced the understanding of this coupling phenomenon,thus,provide a solid foundation for potential future application researches.
作者
周鑫
肖定邦
吴学忠
ZHOU Xin;XIAO Dingbang;WU Xuezhong(College of Intelligence Science,National University of Defense Technology,Changsha 410073,China)
出处
《微纳电子与智能制造》
2020年第4期5-13,共9页
Micro/nano Electronics and Intelligent Manufacturing
基金
国家自然科学基金(51905539)项目资助。
关键词
微机电系统
嵌套环式谐振器
参数泵浦
动力学模态耦合
多尺度摄动法
micro-electromechanical systems
disk resonator
parametric pump
dynamical modal coupling
multiple-scale analysis
