摘要
以石英玻璃的材料去除率和表面粗糙度为评价指标,以转速(A)、压力(B)和研磨液种类(C)为影响因素,进行石英玻璃固结磨料研磨正交试验,对其试验结果进行回归分析并建立3因素下石英玻璃材料去除率和表面粗糙度的影响规律模型。结果表明:影响石英玻璃材料去除率的显著性因素顺序为B>C>A,影响其表面粗糙度的显著性因素顺序为A>B>C。材料去除率最佳的研磨工艺参数组合为转速100 r/min,压力27.580 kPa,三乙醇胺研磨液;表面粗糙度最佳的工艺参数组合为转速100 r/min,压力27.580 kPa,乙二胺研磨液。同时,材料去除率与转速的关系为二次函数形式,材料去除率与压力的关系为指数函数形式;而表面粗糙度与转速及压力的关系均为幂函数形式。以材料去除率为优先考虑目标时可选择三乙醇胺研磨液,以表面质量为优先考虑目标时则可选择乙二胺研磨液。
The material removal rate and the surface roughness were taken as indexes to evaluate quartz glass quality,and the rotating speed(A),the pressure(B)and the lapping slurry type(C)as the influencing factors were studied in the orthogonal test of grinding quartz glass with fixed abrasive.Regression analysis was carried out on the test results,and the influence rule model of three factors on the removal rate and the surface roughness of quartz glass was established.The results show that the most significant factor affecting the removal rate of quartz glass is B,followed by C and A.The most significant factor affecting the surface roughness of quartz glass is A,followed by B and C.The optimum grinding process parameters for the material removal rate are triethanolamine slurry at the rotating speed of 100 r/min and the pressure of 27.580 kPa.The optimum process parameters for the surface roughness are ethylenediamine slurry at the rotating speed of 100 r/min and the pressure of 27.580 kPa.At the same time,the relationship between the material removal rate and the rotating speed is a quadratic function,while the relationship between the material removal rate and the pressure is an exponential function,and the relationships between the surface roughness and the rotating speed&the pressure are both power functions.Triethanolamine slurry can be selected when the material removal rate is the priority objective,and ethylenediamine slurry can be selected when the surface quality is the priority objective.
作者
王占奎
杨亚坤
逄明华
马利杰
梁明超
李勇峰
苏建修
WANG Zhankui;YANG Yakun;PANG Minghua;MA Lijie;LIANG Mingchao;LI Yongfeng;SU Jianxiu(School of Mechanical and Electrical Engineering, Henan Institute of Science and Technology, Xinxiang 453003, Henan, China)
出处
《金刚石与磨料磨具工程》
CAS
北大核心
2020年第5期90-95,共6页
Diamond & Abrasives Engineering
基金
国家自然科学基金项目(U1804142)
河南省科技攻关计划项目(182102210304,192102210216)
河南省青年骨干教师项目(2019GGJS167,2019GGJS171)。
关键词
石英玻璃
固结磨料垫
研磨
材料去除率
表面质量
quartz glass
fixed abrasive pad
lapping
materials removal rate
surface quality
