摘要
采用双辉等离子技术在机电传动轴表面制备了SiC/Ta涂层,研究了反应气体四甲基硅烷对涂层显微组织和耐磨性能的影响。结果表明,不同H_2/TMS流量比例的复合涂层截面都为表面SiC层和Ta过渡层的双层结构特征,涂层截面厚度介于4.8~6μm,当TMS流量至1.5 sccm时,SiC涂层和Ta过渡层较为致密,层间结合良好;4Cr13基体物相主要为Fe-Cr,而不同H2/TMS流量比例的复合涂层处Fe-Cr衍射峰外,还出现了TaC/SiC、Ta2C和Ta2C/SiC衍射峰;基体的磨痕宽度、深度和比磨损率分别为860μm、15.91μm和10^2×10^-5 mm^3/N·m,不同H2/TMS流量比例复合涂层的磨痕宽度、深度和比磨损率都要低于基体,且TMS流量为1.5 sccm时,复合涂层磨痕宽度、深度和比磨损率最小。通过双辉等离子技术在机电传动轴表面制备SiC复合涂层有助于改善基体的耐磨性能,且当TMS流量为1.5 sccm时复合涂层的结构较为致密、摩擦系数较低,具有相对更好的耐磨性能。
SiC/Ta coating was prepared on the surface of electromechanical transmission shaft by double glow plasma technology. The effect of reaction gas tetramethylsilane on the microstructure and wear resistance of the coating was studied. The results show that the cross-sections of composite coatings with different H2/TMS flow ratios are double-layer structure of SiC layer and Ta transition layer. The cross-section thickness of composite coatings ranges from 4.8 to 6 um, when the flow rate of TMS reaches 1.5 sccm, the SiC coating and Ta transition layer are compact and well bonded. The matrix phase of 4Cr13 is mainly Fe-Cr, and besides the Fe-Cr diffraction peak of composite coatings with different H^2 /TMS flow ratio, TaC/ SiC, Ta2C and Ta2C/SiC diffraction peaks;The wear scar width, depth and specific wear rate of the matrix is 860μm、15.91μm 和 102×10^-5mm^3 /N· m,respectively.The wear scar width, depth and specific wear rate of the composite coatings with different H2/TMS flow ratios are lower than those of the matrix, when the flux of TMS is 1.5 sccm, the wear scar width, depth and specific wear rate of the composite coatings are the smallest. The preparation of SiC composite coating on the surface of electromechanical transmission shaft by double glow plasma technology is helpful to improve the wear resistance of the matrix, and when the flux of TMS is 1.5 sccm, the structure of the composite coating is denser, the friction coefficient is lower, and the wear resistance of the composite coating is relatively better.
作者
谢艳艳
王荣
胡艳华
XIE Yanyan;WANG Rong;HU Yanhua(Inner Mongolia Technical College of Mechanical and Electricals, Hohhot 010051, China;Inner Mongolia University of Technology, Hohhot 010051, China)
出处
《中国陶瓷》
CAS
CSCD
北大核心
2019年第7期9-15,共7页
China Ceramics
基金
内蒙古自然基金(2017MS0805)
国家自然基金项目(50761006)
关键词
双辉等离子
SiC复合涂层
形貌
耐磨性能
Double glow plasma
SiC composite coating
Morphology
Wear resistance
