摘要
探讨高温化学腐蚀加工SiC陶瓷工艺参数对加工质量的影响,分析SiC陶瓷的腐蚀机理。分别用失重法和Archimedes法测量试样的腐蚀速率和气孔率;用XRD、SEM、粗糙度测试仪对试样表面的形貌和结构进行表征。结果表明:随着温度和KOH浓度升高,腐蚀速率加快,温度高于碱溶液沸点时,腐蚀效果显著提高;碱溶液浓度过高会造成气孔率下降,升高温度可减缓气孔率下降;在优化的工艺参数下,高温化学腐蚀能够降低样品粗糙度,最低约为1.6μm;表面质量得到改善,轮廓支承长度率Rmr提高,Rmr(50%)达到89.70%;腐蚀温度过高或时间过长将造成晶粒脱落,导致表面质量大幅下降;此外,与机械加工试样相比,高温化学加工后的样品未出现裂纹,表面经简单清洗无反应物残留。
The influence of the process parameters of SiC ceramics on the processing quality was discussed.The corrosion mechanism of SiC ceramics was analyzed.The corrosion rate and porosity of samples were measured by the method of weight-loss and Archimedes respectively.The surface morphology and structure of the specimen were characterized by XRD,SEM and roughness tester.The results show that the corrosion rate increases with the increase of temperature and KOH concentration,and the corrosion effect is significantly improved when the temperature is higher than the boiling point of the alkali solution.The high concentration of alkali solution causes the porosity to decrease,and the increase of temperature can slow down the decrease of porosity.Under the optimized process parameters,the high temperature chemical corrosion can reduce the roughness of the sample,and the minimum roughness(Ra)of the surface is 1.6μm.The surface quality is improved,the length of contour support is increased,and Rmr(50%)reaches 89.70%.The excessive corrosion temperature or too long time causes the grains to fall off,resulting in a sharp drop of surface quality.In addition,compared with the machining samples,no cracks are found on the sample of high temperature chemical processing.After simple cleaning,the surface has no reactant residue.
作者
刘善勇
王玉玲
孙树峰
邵晶
刘庆玉
王津
LIU Shanyong;WANG Yuling;SUN Shufeng;SHAO Jing;LIU Qingyu;WANG Jin(College of Mechanical Engineering,Qingdao University of Technology,Qingdao 266520,Shandong,China)
出处
《航空材料学报》
EI
CAS
CSCD
北大核心
2019年第2期16-24,共9页
Journal of Aeronautical Materials
基金
国家自然科学基金(51775289)
山东省重点研发计划(重大关键技术)项目(2016ZDJS02A15)
山东省研究生教育质量提升计划项目(SDYAL17044)
关键词
SIC
高温化学腐蚀
工艺参数
腐蚀机理
粗糙度
表面形貌
SiC
high temperature chemical etching
process parameters
corrosion mechanism
roughness
surface morphology
