摘要
采用多靶磁控共溅射技术的单靶功率可调特点,在304不锈钢基体上,制备出了FeCrNiMoCu高熵合金涂层。通过纳米压入(Nanoindentation)、X射线衍射仪(XRD)、扫描电子显微镜(SEM)、原子力显微镜(AFM)等对不同组分含量的FeCrNiMoCu高熵合金涂层的纳米硬度、微观结构及形貌进行了表征。结果表明:磁控共溅射法制备的FeCrNiMoCu涂层具有简单的fcc结构和高的纳米硬度,表面硬度随铁元素含量上升而增加。
FeCrNiMoCu high-entropy alloy coatings were prepared on 304 stainless steel by taking advantage of power adjustability of multi-target magnetron co-sputtering. Nano hardness, microstructure and morphology of the as-deposited coatings were investigated by Nano indentation, X-ray diffraction （XRD）, atom force microscopy （AFM） and scanning electron microscopy （SEM）. The results indicate that the coatings have a simple fcc structure and high nano-hardness, and their surface hardness increases with the Fe content increasing
作者
刘春海
蒲国
张伟
颜成杰
崔学军
陈昶
金永中
Liu Chunhai;Pu Guo;Zhang Wei;Yan Chengjie;Cui Xuejun;Chen Chang;Jing Yongzhong(Sichuan University of Science and Engineering, Zigong 643000, China;Material Corrosion and Protection Key Laboratory of Sichuan Province, Zigong 643000, China;YiBin Red-Star Electronics Co. LTD, Yibin 644001, China;Lesban Normal University, Leshan 614000, China)
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2018年第5期1578-1582,共5页
Rare Metal Materials and Engineering
基金
国家自然科学基金青年基金(51201111)
自贡市科技局资助项目(2013X05)
四川理工学院人才引进项目(2011RC05)
四川理工学院大学生创新基金(CX20141020)
四川理工学院科研培育项目(2014PY10)
关键词
磁控共溅射
高熵合金涂层
微结构
纳米硬度
magnetron co-sputtering
high-entropy alloy coating
microstructure
nano-indentation hardness
