摘要
为了获得良好的筛选效果,剔除早期失效产品,通过对LDMOS功率器件的失效情况进行调研分析,设计了LDMOS功率器件的筛选方案。主要研究了LDMOS功率器件失效模式和失效机理之间的对应关系、失效机理与试验项目之间的关系。选取可覆盖全部失效模式的试验项目,并根据各试验项目的特性和作用对其进行排序,形成合理有效的LDMOS功率器件可靠性筛选方案。选用100只某型号LDMOS功率器件按照此方案进行筛选,并对失效产品进行失效分析,验证了方案的有效性。
To achieve positive screening result and eliminate initial failure,the screening scheme of LDMOS power devices is designed through researches and analysis of the failure of LDMOS power devices.Mainly study the relation of the failure mode and failure mechanism,and the relation of the mechanism and test items of LDMOS power devices.And appropriate test items covering all failure modes are selected out and arranged according to the characteristic and the function of each test item to form the reasonable and effective reliability screening scheme of LDMOS power devices.100 devices of a type of LDMOS are screened according to this scheme,and defective devices are analyzed to verify the effectiveness of this scheme.
出处
《电子工艺技术》
2017年第4期208-211,共4页
Electronics Process Technology
基金
河北省自然科学基金项目(项目编号:F2013202256)
