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微焊点中金属原子的热迁移及其对界面反应影响的研究进展 被引量:9

Research progress in thermomigration of metal atoms in micro solder joints and its effect on interfacial reaction
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摘要 电子产品的日益发展要求更高的封装密度、更好的性能和更小的尺寸,使得电子器件所承载的功率密度显著升高,由此产生严重的焦耳热问题,导致作为主要散热通道的微互连焊点内将产生较高的温度梯度,这将诱发金属原子的热迁移,并引起严重的可靠性问题。对近年来有关Sn-Pb、Sn-Ag、Sn-Ag-Cu、Sn-Bi和Sn-Zn等微互连焊点中金属原子的热迁移行为和关键问题进行综合分析,总结热迁移对微互连界面反应的影响,阐述金属原子热迁移的机理和驱动力,并归纳传递热Q*的计算方法及微互连焊点中主要金属元素的Q*值。最后,指出微互连焊点热迁移研究存在的主要问题,并对其未来研究发展趋势进行了展望。 The electronic products are increasingly demanding for higher packing density, better performance and smaller size, resulting in significant increase of power density applied on devices. The issue of Joule heating becomes more severe and a temperature gradient will form in the solder joints which act as the main heat dissipation channel. As a result, thermomigration of metal atoms will occur, which causes serious reliability problems of the solder joints. The thermomigration of metal atoms in Sn-Pb, Sn-Ag, Sn-Ag-Cu, Sn-Bi, Sn-Zn micro interconnect solder joints as well as the key issues were analyzed synthetically. The effect of thermomigration on interfacial reaction was included. The mechanism and the driving force of thermomigration of metal atoms were explained. The calculation methods for heat transport (Q*) and the values of Q* of main metal elements in solder joints were summarized. The main issues and trends of the studies on thermomigration in micro interconnect solder joints were finally proposed.
出处 《中国有色金属学报》 EI CAS CSCD 北大核心 2015年第8期2157-2166,共10页 The Chinese Journal of Nonferrous Metals
基金 国家自然科学基金资助项目(51301030) 中央高校基本科研业务费专项资金项目(DUT14QY45)
关键词 电子封装 互连焊点 钎料 热迁移 界面反应 金属间化合物 electronic packaging interconnect solder joint solder thermomigration interracial reaction intermetalliccompound
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参考文献44

  • 1PLATTEN J K. The soret effect: A review of recent experimental results[J]. Journal &Applied Mechanics, 2006, 73(1 ): 5-15.
  • 2CHEN C, HSIAO H Y, CHANG Y W, OUYANG F ~, TU K N. Thennomigration in solder joints[J]. Materials Science and Engineering R: Reports, 2012, 73(9): 85-100.
  • 3张金松,吴懿平,王永国,陶媛.集成电路微互连结构中的热迁移[J].物理学报,2010,59(6):4395-4402. 被引量:4
  • 4OUYANG F Y, JHU W C. Comparison of thermomigration behaviors between Pb-free flip chip solder joints and microbumps in three dimensional integrated circuits: Bump height effect[J]. Journal of Applied Physics, 2013, 113(4): 043711.
  • 5HUANG M L, YE S, ZHAO N. Current-induced interfacial reactions in Ni/Sn-3Ag-0.5Cu/Au/Pd(P)/Ni-P flip chip interconnect[J]. Journal of Materials Research, 2011, 26(24): 3009-3019.
  • 6LAI Y S, KAO C L. Calibration of electromigration reliability of flip-chip packages by electrothermal coupling analysis[J]. Journal of Electronic Materials, 2006, 35(5): 972-977.
  • 7YE H, BASARAN C, HOPKINS D. Thermomigration in Pb-Sn solder joints under joule heating during electric current stressing[J]. Applied Physics Letters, 2003, 82(7): 1045.
  • 8LAURILA T, VUORINEN V, reactions between lead-tree KIVILAHTI J K. Interracial solders and common base materials[J]. Materials Science and Engineering R: Reports, 2005, 49(1): 1-60.
  • 9赵国际,盛光敏,邓永强.Sn-6.5Zn钎料/Cu基板焊点界面特征与金属间化合物的形成机理[J].中国有色金属学报,2012,22(2):434-440. 被引量:3
  • 10HSIAO H Y, LIU C M, LIN H W, LIU T C, Lu C L, HUANG Y S, CHEN C, TU K N. Unidirectional growth of microbumps on (lll)-oriented and nanotwinned copper[J]. Science, 2012, 336(6084): 1007-1010.

二级参考文献41

  • 1吴懿平,张金松,吴丰顺,安兵.SnAgCu凸点互连的电迁移[J].Journal of Semiconductors,2006,27(6):1136-1140. 被引量:8
  • 2魏秀琴,黄惠珍,周浪,张萌.亚共晶Sn-Zn系合金无铅焊料的性能[J].中国有色金属学报,2006,16(12):1993-1998. 被引量:10
  • 3RAO B S S C,WENG J,SHEN L,LEE T K,ZENG K Y.Morphology and mechanical properties of intermetalliccompounds in SnAgCu solder joints[J].MicroelectronicEngineering,2010,87(11):2416-2422.
  • 4ZHANG L,XUE S B,GAO L L,SHENG Z,ZENG G,CHEN Y,YU S L.Properties of SnAgCu/SnAgCuCe soldered joints forelectronic packaging[J].Journal of Materials Science:Materialsin Electronics,2010,21(6):635-642.
  • 5SUGANUMA K,KIM K S.Sn-Zn low temperature solder[J].Journal of Materials Science:Materials in Electronics,2007,18(1/3):121-127.
  • 6EL-DALY A A,HAMMAD A E.Elastic properties and thermalbehavior of Sn-Zn based lead-free solder alloys[J].Journal ofAlloys and Compounds,2010,505(2):793-800.
  • 7SAAD G,FAWZY A,SHAWKY E.Effect of Ag addition on thecreep characteristics of Sn-8.8wt%Zn solder alloy[J].Journal ofAlloys and Compounds,2009,479(1/2):844-850.
  • 8WEI X Q,HUANG H Z,ZHOU L,ZHANG M,LIU X D.Onthe advantages of using a hypoeutectic Sn-Zn as lead-free soldermaterial[J].Materials Letters,2007,61(3):655-658.
  • 9MAHMUDI R,GERANMAYEH A R,NOORI H,SHAHABI M.Impression creep of hypoeutectic Sn-Zn lead-free solderalloys[J].Materials Science and Engineering A,2008,491(1/2):110-116.
  • 10HO C E,YANG S C,KAO C R.Interfacial reaction issues forlead-free electronic solders[J].Journal of Materials Science:Materials in Electronics,2007,18(1/3):155-174.

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