摘要
采用化学镀、氟涂料和真空离子镀(PVD)技术对涡旋干泵实施防护涂层,对转子和定子采用化学镀镍磷和氟涂料封闭技术制备防护涂层;对曲柄轴和曲柄销采用PVD技术制备Cr/CrN多层复合防护镀层。通过腐蚀试验表明,防护涂层可以长时间抵抗高腐蚀性气体的腐蚀,能够有效地提高涡旋干泵的使用寿命。
Electroless plating, fluorine coating and vacuum ion plating （PVD） technology to implement protective coatings dry scroll vacuum pumps, the rotor and stator using electroless nickel phosphorus and fluorine coating technology to prepare sealed protective coatings ; crank shaft and crank pin using PVD technology to prepare Cr / CrN multilayer protective coat- ings. Corrosion test showed that by etching, a protective coating can be a long resistant to corrosive gases, can effectively improve the dry scroll vacuum pump life.
出处
《低温与特气》
CAS
2014年第4期16-18,共3页
Low Temperature and Specialty Gases
关键词
特种气体
真空泵
腐蚀
防护涂层
specialty gases
vacuum pump
corrosion
protective coatings
