摘要
介绍一种基于双二维PSD实现大长度宽范围直线导轨俯仰角、偏摆角以及空间二维直线度等四个自由度在线测量的新型方法,对其测量原理进行了分析和论证,并建立了求取长直导轨俯仰角、偏摆角的数学模型和基于激光空间偏角修正基础上的二维直线度的数学模型;讨论了影响测量过程的各种因素,提出了消除其影响所应采取的措施。该测量方法提高了长直导轨直线度的测量精度和效率。
A method based on position sensitive detectors（PSD） to simultaneously measure the ditch and yaw error as well as straightness error of long linear guide rails is introduced.The measurement principle is analyzed and validated.The mathematical model of ditch and yaw error as well as straightness error based on correction of laser space angle is also built.The various factors affecting the measurement process are discussed and some measures are taken to eliminate their impact.The measuring precision and efficiency of linear guide rails can be improved by this method.
出处
《光学仪器》
2013年第6期26-30,共5页
Optical Instruments
