摘要
研制成功了一台计算机控制系统 ,用来改进用于纳米复合薄膜制备的离子束辅助沉积技术。计算机、石英晶体振荡器和模糊控制器使系统可以准确地调节沉积速率 ,提高生产效率 。
A computer controlled system has been successfully developed to modify the ion beam assisted deposition technique in nano structured composite thin films growth.Integration of computer,quartz oscillator and fuzzy controller in the system makes it possible to properly adjust evaporation rate,enhance growth efficiency,and ensure the quality of various types of nanostructured composite films such as multilayers and granular films.
出处
《真空科学与技术》
CSCD
北大核心
2000年第4期278-281,共4页
Vacuum Science and Technology
关键词
纳米薄膜复合材料
真空蒸镀
离子束辅助沉积
Nanostructured thin film composite,Vaccum vapor deposition,Ion beam assisted deposition,Computer-controlled system
