摘要
针对压电精密定位系统的精度与实时性问题,提出一种适于压电精密定位系统的模糊控制方法,实现了压电致动器的迟滞特性和阶跃响应的实验建模。设计了压电致动器的模糊控制器,结合仿真结果,实现了基于32位嵌入式处理器S3C2410的压电精密定位模糊控制系统。测试结果表明:系统阶跃响应稳态误差小于0.1μm,调节时间在3ms以内,超调量小于20%;正弦响应误差范围为-0.24～0.20μm。
Aimming to solve problems in accuracy and reality performance of piezo precision posi- tioning system, a fuzzy method was proposed. Hysteresis and step response model of piezo actuator were built with series experiments, Then, fuzzy controller for piezo actuator was suggested, simula- ted and achieved with a 32--bit embedded microprocessor, S3C2410. System tests on precision posi- tioning indicate that about the step response, the steady state error is less than 0. 1μm, the settling time is less than 3ms and the overshoot is less than 20% ; about the sinusoidal response, the displace- ment error is ranged from --0.24μm to 0. 2μm.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2012年第22期2676-2680,共5页
China Mechanical Engineering
基金
江苏省自然科学基金资助项目(BK2009350)
江苏省高校自然科学基金资助项目(09KJB460005)
关键词
模糊控制
响应
精密定位
压电致动器
fuzzy control
response
precision positioning
piezo actuator
