摘要
设计了一种利用PSD测量位移的系统,利用数字信号处理技术同时测量照射在单片PSD上多个光点的位置,实现多个光点的位移同步检测。根据检测系统的特点,提出了PSD相位法位移检测系统的总体方案,设计了检测系统的软件部分和硬件部分。搭建了检测系统的实验平台,在该实验平台上进行了PSD的多光束位移检测实验,实验表明,PSD在正弦调制光的照射下,PSD输出电流信号的相位差与光点的位置存在着明显的线性关系,PSD的转换灵敏度随着调制信号频率的增加而增加。研究工作为多光束位移同步检测提供了一种有效的解决方案。
A measuring displacement system using PSD is designed,using digital signal processing technology we can simultaneously measure the position of the multiple points of light radiated on a single piece of PSD,so as to realize the displacement detection of the multiple points of light.According to the characteristics of the detection syste,the overall program of the displacement measurement system based on DSP is proposed,software part and hardware part of the detection system is designed.The experimental platform of detection system is set up,the detection experiments of the 2D PSD are done.Experiments show that the phase difference of the PSD output current signal has significant linear relationship with the position of the light.Within the range allowed by the modulation frequency,PSD conversion sensitivity is increasing with the increase of the frequency of the modulated signal.The present study work provides a effective solution for multi-beam displacements detection.
出处
《电子测量技术》
2012年第5期29-32,共4页
Electronic Measurement Technology
基金
重庆市自然科学基金资助项目(CSTC
2009BB3363)
研究生科研创新基金(CDJXS11120011)
关键词
PSD
位移同步检测
相位差测量
DSP
PSD
synchronous displacement detection
phase measurement
DSP
