摘要
根据传统近红外光谱仪的不足,利用MEMS微镜设计了近红外光谱仪的光路,并给出了仪器的设计框架,设计了仪器的上位机程序;利用单色仪和29.4%的甲烷气体样品和对样机进行测试,实验结果表明:在10～35℃内,仪器波长稳定性小于2 nm,并能够观测到甲烷在1650 nm附近吸光度约为0.01的吸收峰。MEMS技术应用在近红外光谱仪中,对于气体检测是可行的,并且能够使仪器做到便携式。
According to the deficiency of traditional NIR spectrometer, a light path of NIR spectrometer by MEMS micro-mirror, overall framework and the computer program are designed. The instrument tested by monochromator and CH4 gas of 29.4 %. The results show that between 10 -35 ℃ ,wavelength stability can be reached within 2 nm and an absorption peak of 0.01 absorbency of CH4 near 1 650 nm can also be observed. The MEMS micro-mirror can be applied in the NIR spectrometer for gas detecting, and it makes the instrument portable.
出处
《传感器与微系统》
CSCD
北大核心
2011年第10期120-122,共3页
Transducer and Microsystem Technologies
