摘要
针对直线超声波电动机驱动的精密定位平台,建立了一个完整的闭环控制系统,集人机交互、数据采集显示和位置精确控制于一体。在单纯PID连续控制无法达到理想控制目标的情况下,结合超声波电动机的控制特点,借助其在极短脉冲激励下运行高分辨率的优势,融合了微步控制的思想,最终使系统达到了较好的控制品质。实验表明,系统在不同行程下的重复定位精度在0.5μm以内,且运行平稳、快速。
A precision positioning stage driven by a linear ultrasonic motor was introduced.A complete closed-loop control system was established,integrating human-machine interaction,data acquisition and display,and precise control of position.PID algorithm was applied to control the positioning stage but it can not achieve the desired objectives.Thanks to the control features of linear ultrasonic motors,with the advantage of its high move-resolution when stimulated by ultra-short pulse,micro-step control strategy was absorbed into the PID control.Finally,the positioning system attains a good performance.Experimental results indicate that the repetition positioning accuracy is less than 0.5 μm under different distances,and that the movement is smooth and fast.
出处
《微特电机》
北大核心
2011年第6期66-68,76,共4页
Small & Special Electrical Machines
基金
NSFC-广东联合基金重点项目(U0934004)
关键词
直线超声波电动机
精密定位
PID
微步控制
linear ultrasonic motor
precision positioning
PID
micro-step control
