摘要
采用集成电路光刻工艺在玻璃衬底上制成了以聚酰亚胺（ＰＩ）为介质膜，以铬、金为电极的电容式湿度传感器．给出了传感器的制造工艺、湿敏特性和工作原理．测试结果表明：在相对湿度ＲＨ为０～９６％范围内Ｃ～ＲＨ曲线线性度良好，灵敏度为ＲＨ变化１％，电容变化０．１５～０．１７ｐＦ，该种湿度传感器的ＲＨ长期稳定性为３％／
The capacitive
humidity sensor with polyimide (PI) as a dielectric thin film and Cr, Au as electrodes was
prepared on a substrate of glass using the photolithographic technology for integrated circuits.
The technologies of fabrication, the humidity sensing characteristics and the operation principle
of the sensor were described. The results of measurement showed that linearity of C RH
curves of the sensors is desirable in the range of 0 %～96 % RH of relative humidity and the
sensitivity is of 1% change of RH and 0.15～0.17%pF capacity and RH of the long term
stability of the sensor is 3%/a .
出处
《华中理工大学学报》
CSCD
北大核心
1999年第4期46-48,共3页
Journal of Huazhong University of Science and Technology
关键词
聚酰亚胺薄膜
电容式湿度传感器
集成电路光刻工艺
polyimide thin films
capacitive humidity sensor
photolithographic technology for integrated circuits
