摘要
湿度传感器被广泛应用于气象、农业、医疗、食品安全、工业控制等领域中。基于有机聚合物敏感材料的MEMS湿度传感器因其在灵敏度、可集成性和湿度敏感范围等方面的优异性能,成为当前MEMS湿度传感器的研究重点。首先讨论了不同类型MEMS湿度传感器的工作原理和器件结构,然后对近年来基于有机聚合物材料的MEMS湿度传感器的研究进展进行了归纳和整理。同时,还系统讨论了有机聚合物与金属氧化物、贵金属纳米粒子、二维材料等复合后对MEMS湿度传感器性能的影响。最后,提出了目前阻碍有机聚合物MEMS湿度传感器进一步发展和实际应用的关键问题,并探讨了未来可能的发展方向。
Humidity sensors are widely used in meteorological monitoring,agriculture,medical treatment,food quality monitoring,industrial control and other fields.The organic polymer-based MEMS humidity sensors have excellent performance in the aspects of sensitivity,easy integration and humidity sensitive range.In this review,the principles and structures of different MEMS humidity sensors based on organic polymers are discussed.Meanwhile,the research progress of these humidity sensors in recent years is summarized.In addition,the influence of metal oxides,noble metal nanoparticles and 2D materials on performance of the humidity sensors are systematically discussed when these material are implanted into the organic polymers.Finally,the key issues hindering further development and practical applications of the humidity sensors are put forward,and the future development directions are discussed.
作者
陈贵东
周娜
毛海央
陈大鹏
CHEN Guidong;ZHOU Na;MAO Haiyang;CHEN Dapeng(Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;University of Chinese Academy of Sciences,Beijing 100049,China)
出处
《微纳电子与智能制造》
2021年第4期47-58,共12页
Micro/nano Electronics and Intelligent Manufacturing
基金
国家自然科学基金(61771467)
中国科学院青年创新促进会(2018153,2022117)
广东省重点领域研发计划项目(2019B010117001)资助
