摘要
随着晶体生长理论和生长技术的发展,各种高纯度的晶体已经生产出来,这给晶体管的研制创造了便利条件,同时,也对生长设备的要求提出更加严格的要求。论述单晶炉炉内压力的控制;通过调节比例阀的开度起到改变抽气的速率;从而达到调节炉内压力的目的;实现了理想的压力控制。
Many kinds high purity crystal has been produced successfuUy along with the crystal growth theory and technology development. This, not only provides advantages for transistor research, but also puts forward more strict requests for growing equipment. This paper mainly describes the pressure control of the large size crystal growing equipment. Throttle valve is used to adjust the exhausting rate of gas to change the pressure in the furnace. It gets perfect result.
出处
《电子工业专用设备》
2009年第1期43-46,共4页
Equipment for Electronic Products Manufacturing
关键词
机械泵
电动蝶阀
真空测头
PID控制
前馈控制
Mechanical pump
Throttle valve
Vacuum gauge
PID control
Feed forward action.
