摘要
为了得到纳米孔排列高度有序的多孔阳极氧化铝模板,以0.3 mol.L-1的草酸为电解液研究了模板的制备工艺.采用场发射扫描电子显微镜(FE-SEM)对多孔氧化铝模板的表面形貌进行表征,X射线衍射分析高纯铝及氧化膜的结构.实验结果表明,铝基体不经过高温退火处理,同样能够得到高度有序的氧化铝膜,简化了多孔氧化铝膜的制备工艺.分别讨论了阳极氧化电压和电解液温度对多孔阳极氧化铝膜的形貌及孔径的影响,并对一步法和两步法制得的多孔氧化铝膜进行比较,结果表明,两步阳极氧化法制备的多孔氧化铝模板的有序性优于一步氧化法.XRD分析证实,多孔氧化铝膜由非晶态的A l2O3组成.
In order to obtain porous anodic alumina template with highly ordered nanopore arrays, the process conditions for fabrication template were studied using oxalic acid solution on pure A1 substrate. Field-Emission Scanning Electron Microscope （ FE - SEM） was used to observe the surface morphology of porous anodic aluminum film. The crystal structure of pure aluminum and porous anodic aluminum film was examined with Xray diffraction （XRD）. The comparison results of the pores regularity of anodic alumina films indicated that well ordered anodic alumina film could be obtained without the annealing step, which could simplify the technology process. The effect of anodic voltage and electrolyte temperature on surface morphology and pores diameter of anodic alumina film was investigated respectively. The comparison results of one - step with two-step anodization indicated the pores regularity obtained by two-step anodization was better than that by one-step anodization. X-ray diffraction analysis showed that the anodic films were composed of amorphous Al2O3.
出处
《材料科学与工艺》
EI
CAS
CSCD
北大核心
2007年第1期87-90,94,共5页
Materials Science and Technology
基金
黑龙江省自然科学基金资助项目(E200401)
关键词
铝
阳极氧化
多孔氧化铝
纳米结构
aluminum
anodic oxidation
porous alumina
nanostructure
