摘要
设计了复合基底的微机械共面波导腔结构的微机械微带传输线,研究了它的相关微尺度效应。利用修正相对介电常数法和准静态法分析了微结构金属表面的粗糙度带来的结构传输特性的变化。理论分析了复合基底的微尺度残余应力及其热敏电阻,表明它们对器件的性能影响不可忽视,需要在设计时候给予考虑。利用软件模拟结构的损耗特性,比较了不同粗糙度下的传输性能参数。这些研究方法及其结论为传输线的相关微尺度领域提供了分析基础。
The CPW MEMS microstrip of synthesized substrates is designed, and its some microscale effect are studied. The transmission characteristic ofmierostructure is changed by corrected pennittivity and TEM with metal roughness variety. Residual stress and thermal induce resistance of complex substrates are theoretical analyzed, and these parameters can＇ t neglect when the MEMS devices are designed. The performance of MEMS CPW is obtained by software HFSS, and the performance of MEMS CPW are. compared with different surface roughness. These studied methods and conclusion provided foundation for MEMS CPW＇s microscale studding field.
出处
《激光杂志》
CAS
CSCD
北大核心
2005年第5期26-28,共3页
Laser Journal
关键词
微机械
CPW
复合基底
微尺度效应
Micmmachine
CPW
synthesized substrates
micmscale effect
