The forbidden pitch ＂dip＂ in the critical dimension （CD） through the pitch curve is a well-known optical proximity effect. The CD and CD process window near the ＂dip＂,usually found near a pitch range of 1.1 to 1...The forbidden pitch ＂dip＂ in the critical dimension （CD） through the pitch curve is a well-known optical proximity effect. The CD and CD process window near the ＂dip＂,usually found near a pitch range of 1.1 to 1.4 wavelength/ NA （numerical aperture）,is smaller when compared with other pitches. This is caused by inadequate imaging contrast for an unequal line and space grating. Although this effect is relatively well-known, its relationship with typical process condition parameters,such as the effective image blur caused by the photo-acid diffusion during the post exposure bake or the aberration in the imaging lens, has not been systematically studied. In this paper, we will examine the correlation between the image blur and the effect on the CD, including the decrease in the CD value （the depth of the ＂dip＂） and the CD process window. We find that both the decrease in the CD value and the focus latitude near the forbidden pitch correlate very well with the effective Gaussian image blur. Longer effective diffusion length correlates well with a smaller process window and a deeper CD ＂dip＂. We conclude that the dip depth is very sensitive to the change in image contrast.展开更多
In this paper, we propose a parallel data assimilation module based on ensemble optimal interpolation （EnOI）. We embedded the method into the full-spectral third-generation wind-wave model, WAVEWATCH III Version 3.1...In this paper, we propose a parallel data assimilation module based on ensemble optimal interpolation （EnOI）. We embedded the method into the full-spectral third-generation wind-wave model, WAVEWATCH III Version 3.14, producing a wave data assimilation system. We present our preliminary experiments assimilating altimeter significant wave heights （SWH） using the EnOI-based wave assimilation system. Waters north of 15°S in the Indian Ocean and South China Sea were chosen as the target computational domain, which was two-way nested into the global implementation of the WAVEWATCH III. The wave model was forced by six-hourly ocean surface wind velocities from the cross-calibrated multi-platform wind vector dataset. The assimilation used along-track SWH data from the Jason-2 altimeter. We evaluated the effect of the assimilation on the analyses and hindcasts, and found that our technique was effective. Although there was a considerable mean bias in the control SWHs, a month-long consecutive assimilation reduced the bias by approximately 84% and the root mean-square error （RMSE） by approximately 65%. Improvements in the SWH RMSE for both the analysis and hindcast periods were more significant in July than January, because of the monsoon climate. The improvement in model skill persisted for up to 48 h in July. Furthermore, the SWH data assimilation had the greatest impact in areas and seasons where and when the sea-states were dominated by swells.展开更多
Receiver operating characteristic （ROC） curve is often used to study and compare two- sample problems in medicine. When more information may be available on one treatment than the other, one can improve estimator of...Receiver operating characteristic （ROC） curve is often used to study and compare two- sample problems in medicine. When more information may be available on one treatment than the other, one can improve estimator of ROC curve if the auxiliary population information is taken into account. The authors show that the empirical likelihood method can be naturally adapted to make efficient use of the auxiliary information to such problems. The authors propose a smoothed empirical likelihood estimator for ROC curve with some auxiliary information in medical studies. The proposed estimates are more efficient than those ROC estimators without any auxiliary information, in the sense of comparing asymptotic variances and mean squared error （MSE）. Some asymptotic properties for the empirical likelihood estimation of ROC curve are established. A simulation study is presented to demonstrate the performance of the proposed estimators.展开更多
To facilitate the efficient support of quality-of-service(Qo S)for promising free-space optical(FSO)communication systems,it is essential to model and analyze FSO channels in terms of delay Qo S.However,most existing ...To facilitate the efficient support of quality-of-service(Qo S)for promising free-space optical(FSO)communication systems,it is essential to model and analyze FSO channels in terms of delay Qo S.However,most existing works focus on the average capacity and outage capacity for FSO,which are not enough to characterize the effective transmission data rate when delay-sensitive service is applied.In this paper,the effective capacity of FSO communication systems under statistical Qo S provisioning constraints is investigated to meet heterogeneous traffic demands.A novel closed-form expression for effective capacity is derived under the combined effects of atmospheric turbulence conditions,pointing errors,beam widths,detector sizes and Qo S exponents.The obtained results reveal the effects of some significant parameters on effective capacity,which can be used for the design of FSO systems carrying a wide range of services with diverse Qo S requirements.展开更多
文摘The forbidden pitch ＂dip＂ in the critical dimension （CD） through the pitch curve is a well-known optical proximity effect. The CD and CD process window near the ＂dip＂,usually found near a pitch range of 1.1 to 1.4 wavelength/ NA （numerical aperture）,is smaller when compared with other pitches. This is caused by inadequate imaging contrast for an unequal line and space grating. Although this effect is relatively well-known, its relationship with typical process condition parameters,such as the effective image blur caused by the photo-acid diffusion during the post exposure bake or the aberration in the imaging lens, has not been systematically studied. In this paper, we will examine the correlation between the image blur and the effect on the CD, including the decrease in the CD value （the depth of the ＂dip＂） and the CD process window. We find that both the decrease in the CD value and the focus latitude near the forbidden pitch correlate very well with the effective Gaussian image blur. Longer effective diffusion length correlates well with a smaller process window and a deeper CD ＂dip＂. We conclude that the dip depth is very sensitive to the change in image contrast.
基金Supported by the National Special Research Fund for Non-Profit Marine Sector(Nos.201005033,201105002)the National High Technology Research and Development Program of China(863 Program)(No.2012AA091801)+1 种基金the National Natural Science Foundation of China(No.U1133001)the NSFC-Shandong Joint Fund for Marine Science Research Centers(No.U1406401)
文摘In this paper, we propose a parallel data assimilation module based on ensemble optimal interpolation （EnOI）. We embedded the method into the full-spectral third-generation wind-wave model, WAVEWATCH III Version 3.14, producing a wave data assimilation system. We present our preliminary experiments assimilating altimeter significant wave heights （SWH） using the EnOI-based wave assimilation system. Waters north of 15°S in the Indian Ocean and South China Sea were chosen as the target computational domain, which was two-way nested into the global implementation of the WAVEWATCH III. The wave model was forced by six-hourly ocean surface wind velocities from the cross-calibrated multi-platform wind vector dataset. The assimilation used along-track SWH data from the Jason-2 altimeter. We evaluated the effect of the assimilation on the analyses and hindcasts, and found that our technique was effective. Although there was a considerable mean bias in the control SWHs, a month-long consecutive assimilation reduced the bias by approximately 84% and the root mean-square error （RMSE） by approximately 65%. Improvements in the SWH RMSE for both the analysis and hindcast periods were more significant in July than January, because of the monsoon climate. The improvement in model skill persisted for up to 48 h in July. Furthermore, the SWH data assimilation had the greatest impact in areas and seasons where and when the sea-states were dominated by swells.
基金This research was partially supported by National Natural Science Funds for Distinguished Young Scholar under Grant No. 70825004 and National Natural Science Foundation of China （NSFC） under Grant No. 10731010, the National Basic Research Program under Grant No. 2007CB814902, Creative Research Groups of China under Grant No.10721101 and Shanghai University of Finance and Economics through Project 211 Phase III and Shanghai Leading Academic Discipline Project under Grant No. B803.
文摘Receiver operating characteristic （ROC） curve is often used to study and compare two- sample problems in medicine. When more information may be available on one treatment than the other, one can improve estimator of ROC curve if the auxiliary population information is taken into account. The authors show that the empirical likelihood method can be naturally adapted to make efficient use of the auxiliary information to such problems. The authors propose a smoothed empirical likelihood estimator for ROC curve with some auxiliary information in medical studies. The proposed estimates are more efficient than those ROC estimators without any auxiliary information, in the sense of comparing asymptotic variances and mean squared error （MSE）. Some asymptotic properties for the empirical likelihood estimation of ROC curve are established. A simulation study is presented to demonstrate the performance of the proposed estimators.
基金supported by the Jilin Provincial Science & Technology Department of China(No.20130413052GH)
文摘To facilitate the efficient support of quality-of-service(Qo S)for promising free-space optical(FSO)communication systems,it is essential to model and analyze FSO channels in terms of delay Qo S.However,most existing works focus on the average capacity and outage capacity for FSO,which are not enough to characterize the effective transmission data rate when delay-sensitive service is applied.In this paper,the effective capacity of FSO communication systems under statistical Qo S provisioning constraints is investigated to meet heterogeneous traffic demands.A novel closed-form expression for effective capacity is derived under the combined effects of atmospheric turbulence conditions,pointing errors,beam widths,detector sizes and Qo S exponents.The obtained results reveal the effects of some significant parameters on effective capacity,which can be used for the design of FSO systems carrying a wide range of services with diverse Qo S requirements.
