给出了一种用于非制冷光学读出红外探测器的核心器件———双材料微悬臂梁阵列的设计和制作.微梁阵列是无硅基底的S iNx/Au双材料单层膜结构,其制作工艺简单、可以直接放在空气中成像.实验使用了设计制作的140×98微梁阵列和高信噪...给出了一种用于非制冷光学读出红外探测器的核心器件———双材料微悬臂梁阵列的设计和制作.微梁阵列是无硅基底的S iNx/Au双材料单层膜结构,其制作工艺简单、可以直接放在空气中成像.实验使用了设计制作的140×98微梁阵列和高信噪比的12-b it CCD,得到120℃以上的物体热像,噪声等效温度差(NETD)为7K左右,实验结果与热机械模型预测结果一致.展开更多
We present a new substrate-free bimaterial cantilever array made of SiNx and Au for an uncooled microoptomechanical infrared imaging device. Each cantilever element has an optimized deformation magnification structure...We present a new substrate-free bimaterial cantilever array made of SiNx and Au for an uncooled microoptomechanical infrared imaging device. Each cantilever element has an optimized deformation magnification structure. A 160×160 array with a 120 μm×120μm pitch is fabricated and an optical readout is used to collectively measure deflections of all microcantilevers in the array. Thermal images of room-temperature objects with higher spatial resolution have been obtained and the noise-equivalent temperature difference of the fabricated focal plane arrays is given statistically and is measured to be about 270mK.展开更多
The hazard of Hg ion pollution triggers the motivation to explore a fast, sensitive, and reliable detection method. Here, we design and fabricate novel 36-nm-thick Ag-Au composite layers alternately deposited on three...The hazard of Hg ion pollution triggers the motivation to explore a fast, sensitive, and reliable detection method. Here, we design and fabricate novel 36-nm-thick Ag-Au composite layers alternately deposited on three-dimensional （3D） periodic SiO2 nanogrids as surface-enhanced Raman scattering （SERS） probes. The SERS effects of the probes depend mainly on the positions and intensities of their localized surface plasmon resonance （LSPR） peaks, which is confirmed by the absorption spectra from finite-difference time-domain （FDTD） calculations. By optimizing the structure and material to maximize the intrinsic electric field enhancement based on the design method of 3D periodic SERS probes proposed, high performance of the Ag-Au/SiO2 nanogrid probes is achieved with the stability further enhanced by annealing. The optimized probes show the outstanding stability with only 4.0% SERS intensity change during 10-day storage, the excellent detection uniformity of 5.78% （RSD）, the detection limit of 5.0 × 10-12 M （1 ppt）, and superior selectivity for Hg ions. The present study renders it possible to realize the rapid and reliable detection of trace heavy metal ions by developing high- performance 3D periodic structure SERS probes by designing novel 3D structure and optimizing plasmonic material.展开更多
Pixelated micropolarizer arrays （PMAs） have recently been used as key components to achieve real-time phase measurement. PMA fabrication by electron beam lithography and inductively coupled plasma-reactive ion etchi...Pixelated micropolarizer arrays （PMAs） have recently been used as key components to achieve real-time phase measurement. PMA fabrication by electron beam lithography and inductively coupled plasma-reactive ion etching is proposed in this work. A 320 × 240 aluminum PMA with 7.4 μm pitch is successfully fabricated by the proposed technique. The period of the grating is 140nm, and the polarization directions of each of the 2 × 2 units are 0°, 45°, 90°, and 135°. The scanning electron microscopy and optical microscopy results show that the PMA has a good surface characteristic and polarization performances. When the PMA is applied to phase-shifting interferometry, four fringe patterns of different polarization directions are obtained from only one single frame image, and then the object wave phase is calculated in real time.展开更多
文摘给出了一种用于非制冷光学读出红外探测器的核心器件———双材料微悬臂梁阵列的设计和制作.微梁阵列是无硅基底的S iNx/Au双材料单层膜结构,其制作工艺简单、可以直接放在空气中成像.实验使用了设计制作的140×98微梁阵列和高信噪比的12-b it CCD,得到120℃以上的物体热像,噪声等效温度差(NETD)为7K左右,实验结果与热机械模型预测结果一致.
基金Supported by the National Natural Science Foundation of China under Grant Nos 10472111, 10732080 and 10627201, and the National Basic Research Programme of China under Grant No 2006CB300404.
文摘We present a new substrate-free bimaterial cantilever array made of SiNx and Au for an uncooled microoptomechanical infrared imaging device. Each cantilever element has an optimized deformation magnification structure. A 160×160 array with a 120 μm×120μm pitch is fabricated and an optical readout is used to collectively measure deflections of all microcantilevers in the array. Thermal images of room-temperature objects with higher spatial resolution have been obtained and the noise-equivalent temperature difference of the fabricated focal plane arrays is given statistically and is measured to be about 270mK.
基金Project supported by the National Key Research and Development Program of China(Grant No.2017YFA0207104)the Strategic Priority Research Program of the Chinese Academy of Sciences(Grant No.XDA09040101)+2 种基金the National Natural Science Foundation of China(Grant No.Y6061111JJ)the Youth Innovation Promotion Association of Chinese Academy of Sciences(Grant No.2015030)the Key Technology Talent Program of Chinese Academy of Sciences(Grant Nos.Y8482911ZX and Y7602921ZX)
文摘The hazard of Hg ion pollution triggers the motivation to explore a fast, sensitive, and reliable detection method. Here, we design and fabricate novel 36-nm-thick Ag-Au composite layers alternately deposited on three-dimensional （3D） periodic SiO2 nanogrids as surface-enhanced Raman scattering （SERS） probes. The SERS effects of the probes depend mainly on the positions and intensities of their localized surface plasmon resonance （LSPR） peaks, which is confirmed by the absorption spectra from finite-difference time-domain （FDTD） calculations. By optimizing the structure and material to maximize the intrinsic electric field enhancement based on the design method of 3D periodic SERS probes proposed, high performance of the Ag-Au/SiO2 nanogrid probes is achieved with the stability further enhanced by annealing. The optimized probes show the outstanding stability with only 4.0% SERS intensity change during 10-day storage, the excellent detection uniformity of 5.78% （RSD）, the detection limit of 5.0 × 10-12 M （1 ppt）, and superior selectivity for Hg ions. The present study renders it possible to realize the rapid and reliable detection of trace heavy metal ions by developing high- performance 3D periodic structure SERS probes by designing novel 3D structure and optimizing plasmonic material.
基金Supported by the National Basic Research Program of China under Grant No 2011CB302105, the National Natural Science Foundation of China under Grant Nos 11332010, 11102201, 11127201, 11472266 and 11372300, and the Instrument Developing Project of the Chinese Academy of Sciences under Grant No YZ201265.
文摘Pixelated micropolarizer arrays （PMAs） have recently been used as key components to achieve real-time phase measurement. PMA fabrication by electron beam lithography and inductively coupled plasma-reactive ion etching is proposed in this work. A 320 × 240 aluminum PMA with 7.4 μm pitch is successfully fabricated by the proposed technique. The period of the grating is 140nm, and the polarization directions of each of the 2 × 2 units are 0°, 45°, 90°, and 135°. The scanning electron microscopy and optical microscopy results show that the PMA has a good surface characteristic and polarization performances. When the PMA is applied to phase-shifting interferometry, four fringe patterns of different polarization directions are obtained from only one single frame image, and then the object wave phase is calculated in real time.
