We designed a high-precision array pulse sensor for TCM （traditional Chinese medicine） that can directly transform pulse-pressure signal into electric current signal and is compatible with CMOS technology. We adopte...We designed a high-precision array pulse sensor for TCM （traditional Chinese medicine） that can directly transform pulse-pressure signal into electric current signal and is compatible with CMOS technology. We adopted a sacrificelayer craft for the transistor gate. During testing, we found that the precision of the capacitor for the array sensor is 0. 5fF/hPa when the pressure was changing within the range of 1.5kPa to 9.5kPa. More importantly, the output-current and the pressure of the sensor have a good linearity and exponential characteristics. According to the data from the experiment,we conclude that the characteristic of the response-current is related to the area of the MOS gate.展开更多
文摘We designed a high-precision array pulse sensor for TCM （traditional Chinese medicine） that can directly transform pulse-pressure signal into electric current signal and is compatible with CMOS technology. We adopted a sacrificelayer craft for the transistor gate. During testing, we found that the precision of the capacitor for the array sensor is 0. 5fF/hPa when the pressure was changing within the range of 1.5kPa to 9.5kPa. More importantly, the output-current and the pressure of the sensor have a good linearity and exponential characteristics. According to the data from the experiment,we conclude that the characteristic of the response-current is related to the area of the MOS gate.
