摘要
We designed a high-precision array pulse sensor for TCM （traditional Chinese medicine） that can directly transform pulse-pressure signal into electric current signal and is compatible with CMOS technology. We adopted a sacrificelayer craft for the transistor gate. During testing, we found that the precision of the capacitor for the array sensor is 0. 5fF/hPa when the pressure was changing within the range of 1.5kPa to 9.5kPa. More importantly, the output-current and the pressure of the sensor have a good linearity and exponential characteristics. According to the data from the experiment,we conclude that the characteristic of the response-current is related to the area of the MOS gate.
提出了一种可以把脉搏压力信号直接转换为电流信号输出的高精度阵列脉搏传感器.采用牺牲层法加工晶体管的栅极与CMOS工艺具有良好的兼容性.对传感器栅电容和输出电流进行测试,在1.5-9.5kPa的动态范围,传感器电容的灵敏度约为0.5fF/hPa;传感器输出电流与压力呈现较好的线性和指数特性.分析结果表明MOS栅面积的改变对压力-电流响应曲线的线性度有一定影响.
