摘要
本文主要介绍新颖的Si_(1-x)Ge_x/Si异质结内光电发射长波红外探测器和焦平面阵列的现状、典型结构、性能参数及制备技术.
In the paper, the state of art, he typical structure, the properties and the fabrication technology for the Novel Si_(1-x)Ge_x/Si heterojunction barrier internal Pocal Plane array (FPA) are described.
出处
《光电子技术》
CAS
1992年第1期37-41,共5页
Optoelectronic Technology
