摘要
采用磁控溅射制备SnO2薄膜气敏元件,测试了气敏元件的性能,研究了SnO2薄膜气敏元件薄膜厚度、元件加热功率和环境温度和湿度对元件的影响,气敏元件具有很好的灵敏度和选择性特性,对其敏感机理进行了探讨。
*'SnO2 film gas sening element was prepared by magnetron sputtering,the influence on the character of gas sensing element was analysed and researched,such as the thickness of film, power of heater,temperature and humidity of circumstance.The element had very well sensitivity and selectivity,the sensitive mechanism was discussed.
出处
《传感器技术》
CSCD
北大核心
2003年第1期61-64,共4页
Journal of Transducer Technology
