摘要
电子束曝光机版图切割过程中可能出现带内孔的多边形 ,并且多边形内环与外环之间可能发生重叠。针对这种多边形 ,提出了新的基于矢量边的重复交点处理方法 。
During the layerout cutting process for the e beam lithography system, some polygons with one or more inner holes may appear. And the boundaries of the inner holes may overlap the one of the outer ring.A new method to sort overlapped intersectant points for oriented line segments. Based on it, a robust combination algorithm for this kind of polygons is introduced.
出处
《微细加工技术》
2002年第3期28-32,39,共6页
Microfabrication Technology
关键词
带内孔
多边形
并运算
版图切割
电子束曝光机
polygon
combination algorithm
layerout cutting
e beam lithography system
