摘要
This paper presents a literature review exploring the potential of piezoelectric field-effect transistors(piezo-FETs)as bionic microelectromechanical systems(MEMS).First,piezo-FETs are introduced as bionic counterparts to natural mechanoreceptors,highlighting their classic configuration and working principles.Then,this paper summarizes the existing research on piezo-FETs as sensors for pressure,inertial,and acoustic sensors.Material selections,design characteristics,and key performance metrics are reviewed to demonstrate the advantage of piezo-FETs over traditional piezoelectric sensors.After identifying the limitations in these existing studies,this paper proposes using bionic piezoelectric coupling structures in piezo-FETs to further enhance the sensing capabilities of these artificial mechanoreceptors.Experimentally validated manufacturing methods for the newly proposed piezo-FET structures are also reviewed,pointing out a novel,feasible,and impactful research direction on these bionic piezoelectric MEMS sensors.
