摘要
为了研究计及极板横向边缘效应的摆式差动电容倾角传感器的输出特性,利用保角变换法和格林函数法,讨论电容式倾角传感器的电场,得到其电容量随角位移的变化关系,通过MATLAB软件绘制出该传感器输出特性曲线,并对影响该传感器输出特性的因素做了定量分析。仿真模拟结果显示,在传感器的动极板的宽度小于静极板时,增大两极板的宽度差,再适度增大极板的间距,并减小极板直缝隙的宽度,可提高该传感器灵敏度及线性度,改善其输出特性。
In order to study the output characteristics of a pendulum differential capacitive tilt sensor that takes into account the lateral edge effect of the capacitor plate,the conformal transformation and Green's function are used to discuss the electric field of the capacitive tilt sensor,and the relationship between its capacitance and angular displacement is obtained.The output characteristics curve of the sensor is plotted using MATLAB,and a quantitative analysis is conducted on the factors that affect the output characteristics of the sensor.The simulation results show that when the width of the moving plate of the sensor is smaller than that of the stationary plate,increasing the width difference between the two plates,moderately increasing the spacing between the plates,and reducing the width of the straight gap of the plates can improve the linearity and sensitivity of the sensor,and its output characteristics.
作者
周江
王福谦
ZHOU Jiang;WANG Fuqian(Southwest Jiaotong University Hope College,Chengdu 610400,China;Institute of applied physics,university of electronic science and technology of China,Chengdu 611731,China)
出处
《宇航计测技术》
CSCD
2024年第4期64-71,共8页
Journal of Astronautic Metrology and Measurement
基金
四川省教育科研课题(SCJG20A275)
西南交通大学希望学院优秀科技创新团队项目(20220401)。
关键词
摆式差动电容倾角传感器
保角变换
格林函数法
边缘效应
输出特性
Pendulum differential capacitive tilt sensor
Conformal mapping
Green's function
Edge effect
Output characteristics
