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金刚石表面生长石墨烯的纳观尺度机理研究进展

Research Progress in the Nanoscale Mechanism of Graphene Growth on Diamond Surface
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摘要 近年来,将石墨烯转移至金刚石表面形成的石墨烯/金刚石异质结构在精密制造、电子制造等领域展现出显著优势,但石墨烯本征特性会因转移至介电基材后缺陷和界面处的声子散射而明显减弱。因此,以金刚石作为衬底直接生长石墨烯成为获得高质量石墨烯/金刚石异质结构的一种全新尝试。虽然以金刚石作为衬底相比于其他介电材料拥有众多优势,但是现阶段在金刚石表面生长的石墨烯通常存在晶格缺陷多、畴区尺寸小等缺点,也缺乏纳观尺度下金刚石结构表面石墨烯生长的机理解析和理论指导。本文评述了在金属催化、非金属诱导和高温热解三种催化方式下金刚石表面生长石墨烯的纳观尺度机理研究进展,对不同催化方式下金刚石表面生长石墨烯的原子机理进行了总结,并对不同催化条件下生长石墨烯的典型结果进行对比分析,最后归纳了金刚石结构表面生长石墨烯研究所面临的关键问题与挑战,展望了基于金刚石表面石墨烯生长研究的发展方向,可为高质量石墨烯/金刚石异质结构的研究与应用提供有益借鉴。 In recent decades,the graphene/diamond heterostructure formed by transferring graphene to the diamond surface has shown significant superiorities in the fields of ultra-precision manufacturing and microelectronics,whereas the intrinsic properties of graphene can be weakened significantly owing to the phonon scattering at the interface and the generation of defects after transferring graphene to the dielectric substrate.As a result,the direct growth of graphene on diamond has become a creative attempt to obtain a high-quality graphene/diamond heterostructure.Although the use of diamond as the substrate has a number of advantages in theory over other dielectric materials,the graphene grown on the diamond still has the drawbacks of many lattice defects and the small size of domain.Up to date,there is a shortage of mechanism analysis and theoretical guidance at nanoscale for graphene growth on diamond.This article summarizes the research progress on the nanoscale mechanism of graphene growth on diamond mediated by metal catalysis,nonmetallic atoms doping,and pyrolysis catalysis respectively.Concurrently,the typical results of graphene obtained under different process conditions are compared.Lastly,the challenges faced by the graphene growth on diamond are summarized,and the development direction of study on the nanoscale mechanism of graphene growth on diamond surface is prospected.In brief,the thesis lays a theoretical basis for the research and application of high-quality graphene/diamond heterostructures.
作者 陈善登 白清顺 窦昱昊 郭万民 郭永博 杜云龙 CHEN Shandeng;BAI Qingshun;DOU Yuhao;GUO Wanmin;GUO Yongbo;DU Yunlong(School of Mechatronics Engineering,Harbin Institute of Technology,Harbin 150001,China)
出处 《材料导报》 CSCD 北大核心 2023年第16期45-51,共7页 Materials Reports
基金 国家自然科学基金(52075129,51775146) 国家自然科学基金委员会-中国工程物理研究院联合基金(U2030109)。
关键词 石墨烯 金刚石 金属催化 非金属原子掺杂 graphene diamond metal catalysis nonmetallic atom doping
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