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C_(4)F_(7)N质量流量转换系数测定方法 被引量:6

Measurement Method of C4F7N Mass Flow Conversion Coefficient
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摘要 C_(4)F_(7)N混合气体处理和检测技术的研究需要以稳定的气体流量为基础,因此研究C_(4)F_(7)N气体的质量流量转换系数具有重要的工程意义。为此研究了C_(4)F_(7)N的质量流量转换系数测定方法:由一台步进电机同时匀速推动两个独立气室中的活塞,使C_(4)F_(7)N和N_(2)在相同的压力下以相同的流量流动,采用出厂为N_(2)标定的气体质量流量控制器记录两路流量示值;改变上述步进电机的转速,可获得不同流量下的流量示值,采用最小二乘法对两路流量数据进行线性拟合,得到C_(4)F_(7)N质量流量转换系数与气体流量的线性关系式,代入流量值可计算出C_(4)F_(7)N质量流量转换系数。同样方法可得出C_(4)F_(7)N与CO_(2)混合气体的质量流量转换系数,与理论值误差在0.5%以内。本研究成果为C_(4)F_(7)N混合气体相关产品的研发奠定了校验基础。 The research of processing and detection technology for C_(4)F_(7)N-mixed gas needs to be based on a stable gas flow.Therefore,studying the mass flow conversion coefficient of C_(4)F_(7)N gas is of important engineering significance.This paper studies the measurement method of C_(4)F_(7)N’s mass flow conversion coefficient.A stepping motor simultaneously pushes pistons in two independent gas chambers at a constant speed,so that C_(4)F_(7)N and N_(2)flow at the same flow rate under the same pressure.The gas mass flow controller calibrated for N_(2)at the factory is used to record the flow indications of the two channels.By changing the speed of the stepper motor mentioned above,the flow indication values under different flow rates can be obtained.The least square method is used to linearly fit the flow data of the two channels,then the linear relationship between the C_(4)F_(7)N mass flow conversion coefficient and the gas flow is obtained,and the C_(4)F_(7)N mass flow conversion coefficient can be calculated by substituting the flow value.In the same way,the mass flow conversion coefficient of C_(4)F_(7)N/CO_(2)-mixed gas can be obtained,and the error from the theoretical value is within±0.5%.The results of this research provide a verification foundation for the research and development of C_(4)F_(7)N-mixed gas related products.
作者 邵先军 谢成 丁五行 王鑫 SHAO Xianjun;XIE Cheng;DING Wuxing;WANG Xin(State Grid Zhejiang Electric Power Research Institute,Hangzhou 310014,China;T&P Union(Beijing)Co.,Ltd.,Beijing 100096,China)
出处 《高电压技术》 EI CAS CSCD 北大核心 2022年第5期1791-1797,共7页 High Voltage Engineering
基金 国家电网有限公司科技项目(5200-201919063A-0-0-00)。
关键词 C_(4)F_(7)N气体 质量流量转换系数 测定方法 测定装置 最小二乘法 C_(4)F_(7)N gas mass flow conversion coefficient measurement method measuring device least square method
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