摘要
全氟化物气体(PFCs)中典型的温室气体SF_(6)和CF_(4)在环境中的排放从长远来看对大气温室效应的影响非常大。大气压微波等离子体炬的稳定放电状态提供了适合于气相化学反应的等离子体环境。为此利用大气压微波等离子体炬对SF_(6)和CF_(4)的分解和转化进行了研究,考察了通过傅立叶红外吸收光谱(FTIR)定量测量的去除率(destruction and remove efficiency,DRE)随着微波功率、气体体积流量、混合体积分数、反应室的结构等外部控制参数的变化规律。实验表明:通过增加优化化学反应缓冲室的结构参数和设置合适的工作条件可以使两者的去除率接近100%。因此,利用大气压微波等离子体炬针对一些实际工况下SF_(6)和CF_(4)的排放是能够有效控制的,例如,基于大气压微波等离子体技术的车载移动式处理设备,对降解和处理电力工业排放的SF_(6)给出了一种解决方案;采用管线末端处理方式,大气压微波等离子体炬应用于降解半导体工业排放的CF_(4)等尾气是一种具有应用前景的技术。
The emission of SF_(6) and CF_(4),two typical gases of the perfluorocompounds(PFCs),imposes great influence on global greenhouse effect in long term.The atmospheric-pressure microwave plasma torch(ATMPT)operating in a controllable stability can provide a plasma environment suitable for gas-phase chemical reaction.We studied the decomposition and conversion of SF_(6) and CF_(4)in ATMPT.The variation of destruction and removal efficiency(DRE)by measuring FTIR spectra is investigated with respect to the external control parameters,such as the microwave power,concentration,total gas flow,and the structure parameters of reaction chamber.The experimental results demonstrate that the DRE of SF_(6) and CF_(4) can approach 100%in some actual working conditions by increasing the microwave power and optimizing the structural parameters of reaction chamber and working conditions.So the emission of SF_(6) and CF_(4) can be controlled effectively by ATMPT in some actual working conditions,for example,the vehicle-mounted mobile processing equipment based on ATMPT is a possible solution for removing SF_(6) from emissions of power industry;moreover,in the pipeline terminal processing,ATMPT is shown as a promising technology for abating the exhaust gas,such as CF_(4) from semiconductor industry.
作者
李寿哲
谢士辉
吴悦
廖宏达
LI Shouzhe;XIE Shihui;WU Yue;LIAO Hongda(Key Laboratory of Materials Modification by Laser,Ion and Electron Beams,Ministry of Education,Department of Physics,Dalian University of Technology,Dalian 116024,China)
出处
《高电压技术》
EI
CAS
CSCD
北大核心
2021年第8期3012-3019,共8页
High Voltage Engineering
基金
国家自然科学基金(11975003,11575040)
中央高校基本科研业务费专项资金(DUT18LAB08)。
关键词
温室气体
大气压
微波等离子体
去除率(DRE)
降解
全氟化物气体(PFCs)
greenhouse gas
atmospheric pressure
microwave plasma
destruction and removal efficiency(DRE)
decomposition
perfluorocompounds(PFCs)
