摘要
为了提高微波气体测量系统的测量精度,针对其主要测量元件开口微波谐振腔选频能力较弱的问题,对谐振腔的耦合孔及通风孔进行优化设计。以建立在9.6 GHz的圆柱谐振腔模型为基础,采用矩形波导从腔的侧壁进行的孔耦合,激发圆柱谐振腔的TE011振荡模式。通过ANSYS Electronics Desktop软件对具有不同耦合孔和通风孔的谐振腔进行仿真,分析了S参数曲线和Smith圆图,得到谐振腔系统的最佳耦合状态。仿真和实验测量结果表明,当所设计的微波谐振腔在耦合孔的半径为1.96 mm,通风孔的内直径为32 mm,通风孔的角度为105°时,具有最佳的选频能力。
In order to improve the measurement accuracy of the microwave system for measuring gas,the vents and the hole-coupling slot of the resonator cavity are optimized to address the weak performance for frequency selection of the microwave resonator cavity used as the main measurement component in this system.The cylindrical resonator cavity is designed to operate at 9.6 GHz.The TE011mode is excited from the side wall of the cylindrical cavity using a rectangular waveguide by the hole-coupling method.Based on the established resonator system model,ANSYS Electronics Desktop software is used to simulate the cavities with different slot sizes,vent sizes,and vent angles.According to the S-parameters and Smith charts of simulation results,the optimal coupling type of the resonator cavity system is obtained.The simulation and experimental measurement results show that when the slot radius,the inner radius of the top walls,and angle of the vents are 1.96 mm,32 mm,and 150 deg,respectively,the microwave resonator cavity has the best performance for frequency selection.
作者
张瑜
王晓雪
韩明硕
李爽
ZHANG Yu;WANG Xiaoxue;HAN Mingshuo;LI Shuang(Henan Normal University,Xinxiang 453001,China;The Chinese Peopled Liberation Army 91709 troops,Hunchun 133300,China;Luoyang Normal University,Luoyang 471000,China)
出处
《真空科学与技术学报》
CAS
CSCD
北大核心
2021年第7期668-673,共6页
Chinese Journal of Vacuum Science and Technology
基金
河南省科技攻关重点项目(172102210046):精密气体湿度测试仪的研制。
关键词
微波谐振腔
气体测量
孔耦合
介电常数
品质因数
Microwave resonator cavity
Gas measurement
Hole coupling
Dielectric constant
Quality factor
