摘要
针对自由曲面面形干涉测量的需求,提出了一种部分补偿干涉测量的可变形镜面形设计的优化方法,以克服多变量优化易陷入局部最优以及无法有效约束可变形镜行程的问题。方法基于光线追迹原理建立自由曲面光学仿真系统,采用泽尼克多项式表征可变形镜面形,通过计算面形矢高约束其表面行程;以像面波前为优化目标,构建带约束条件的最优化求解问题模型;基于节点像差理论完成优化变量的筛选,结合模拟退火算法寻找全局最优解。针对典型自由曲面,设计了基于可变形镜的折反射式部分补偿器,仿真结果表明方法可以将系统的剩余波前峰谷值从32.20λ降到6.55λ,剩余波前斜率最大值从0.53(λ·pixel^(-1))降到0.11(λ·pixel^(-1)),满足部分补偿检测的要求。
In order to meet the requirements of freeform surface shape measurement, an optimization method of deformable mirror shape design for freeform surface partial compensation interferometry is proposed to overcome the problem that multi-parametric optimization is easy to fall into local optimization and can not effectively constrain the deformation range of deformable mirror. The optical simulation system is established based on the principle of ray tracing, and the deformable mirror shape is characterized by Zernike polynomials. The deformation range of deformable mirror is constrained by calculating the vector height of the surface, and an optimal solution model with constraint conditions is constructed with the wavefront as the optimization objective. Based on the nodal aberration theory, the optimization variables are selected, and the global optimal solution is found by combining the simulated annealing algorithm. In order to measure a typical freeform surface, a catadioptric partial compensator based on deformable mirror is designed. The simulation results show that the method can reduce the peak valley value of residual wavefront from 32.20λ to 6.55λ, and the maximum residual wavefront slope from 0.53(λ·pixel^(-1)) to 0.11(λ·pixel^(-1)), which meets the requirements of partial compensation detection.
作者
周颋
郝群
胡摇
宁妍
ZHOU Ting;HAO Qun;HU Yao;NING Yan(Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China)
出处
《光学技术》
CAS
CSCD
北大核心
2021年第3期257-264,共8页
Optical Technique
基金
国家自然科学基金(51735002)
中国科学院战略性先导科技专项(XDA25020317)。
