摘要
光学自由曲面具有强大的矫正像差和优化系统结构的能力,被誉为现代光学系统的变革性元件。但是,自由曲面面形过于复杂,其高精度检测存在巨大的难度,这限制了自由曲面面形的制造水平,其大规模应用也受到限制。目前,光学自由曲面的检测技术主要是从非球面检测技术发展而来的。回顾了近年来光学自由曲面检测方法的发展历程,着重分析了几种典型的检测方法及其特点,并展望了自由曲面检测技术的未来发展趋势。
An optical freeform surface has been recognized as a revolutionary element in a modern optical system because of its powerful ability of simultaneous aberration correction and structural optimization. However, the complex shape of its surface brings enormous difficulties and challenges to the precise measurement, which limits its manufacture level and has been one of the bottlenecks of its broad applications. Currently, the main measurement methods of an optical freeform surface are mainly developed from the ideas of aspheric measurement technologies. In this paper, we reviewed the development of the optical freeform surface measurement methods, especially focused on several typical measurement methods and their characteristics, and looked forward to the development trend of freeform surface measurement in future.
作者
朱日宏
孙越
沈华
Zhu Rihong;Sun Yue;Shen Hua(School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing,Jiangsu 210094,China;MIIT Key Laboratory of Advanced Solid Laser,Nanjing University of Science and Technology,Nanjing,Jiangsu 210094,China)
出处
《光学学报》
EI
CAS
CSCD
北大核心
2021年第1期154-171,共18页
Acta Optica Sinica
基金
国家自然科学基金(61775096)
装备发展部预研领域基金(61404140105)。
关键词
测量
光学自由曲面
面形检测
轮廓法
结构光
干涉法
measurement
optical freeform surface
surface measurement
profilometry
structured light
interferometry
