摘要
X射线能谱仪(EDS)作为扫描电镜的重要附件,能够便捷、快速地分析样品微区的元素信息。然而,部分难分析样品在采用常规的EDS测试技术时会出现较大的分析误差或错误。本文利用装配布鲁克QUANTAX XFlash 6|30能谱探测器的Zeiss sigma 500型场发射扫描电镜,针对轻重元素兼具样品、粗糙不平整样品、谱峰相近元素样品以及纳米填充颗粒四种较难检测样品的能谱分析,分别给出了相应的解决技术并剖析了典型的应用案例,相比较常规技术,其能谱分析的准确性获得了很大的提高,这些解决问题的思路和方法可作为今后分析类似样品的一种参考。
As an important accessory of scanning electron microscope,X-ray energy spectrometer can analyze the element information of sample micro area conveniently and quickly.However,some of the hard to analyze samples will have large analysis errors or errors when using conventional EDS testing technology.In this paper,using Zeiss sigma 500 to assemble Bruker QUANTAX XFlash 6|30 energy spectrum detector,for the energy spectrum analysis of heavy and light element samples,rough and uneven samples,similar element samples and nano filled particles,the corresponding solutions are given and typical application cases are analyzed.Compared with conventional technology,the accuracy of energy spectrum analysis is greatly improved.These solutions can be used as a reference for the analysis of similar samples in the future.
作者
蔡志伟
任小明
禹宝军
CAI Zhi-wei;REN Xiao-ming;YU Bao-jun(School of materials science and engineering,Hubei University,Wuhan Hubei 430062;Brooke(Beijing)Technology Co.Ltd.,Beijing 100000,China)
出处
《电子显微学报》
CAS
CSCD
北大核心
2021年第1期55-60,共6页
Journal of Chinese Electron Microscopy Society
基金
湖北省高等学校实验室研究项目(No.HBSY2019-15).
关键词
能谱分析
难检测样品
分析误差
应用案例
energy spectrum analysis
hard to detect samples
analysis error
application cases
