摘要
钇铝石榴石(YAG)是一种应用广泛的硬脆难加工材料,其抛光过程工艺复杂、效率低。固结磨料抛光技术具有平坦化能力优、对工件形貌选择性高、磨料利用率高等优点。试验采用固结磨料抛光YAG晶体,研究固结磨料垫的基体硬度和金刚石磨粒尺寸对YAG晶体的材料去除率和表面质量的影响。结果表明:当基体硬度适中为Ⅱ、金刚石磨粒尺寸3~5μm时,固结磨料抛光YAG晶体效果最优,其材料去除率为255 nm/min,表面粗糙度Sa值为1.79 nm。
Yttrium aluminum garnet(YAG)is a kind of hard-brittle and difficult-to-machine material with wide application.Its polishing process is complicated and inefficient.Fixed abrasive polishing technology has the advantages of excellent planarization ability,high selectivity for workpiece surface morphology,and high abrasive utilization.The effect of matrix hardness and diamond particle size of fixed abrasive pad on material removal rate and surface quality was investigated in fixed abrasive polishing of YAG crystal.The results show that when the hardness of the matrix is moderate toⅡand the diamond abrasive size is 3 to 5μm,the effect of fixed abrasive polishing of YAG crystal is the best.Under these conditions,material removal rate is 255 nm/min and surface roughness Sa is 1.79 nm in fixed abrasive polishing of YAG crystal.
作者
明舜
李军
张羽驰
邱阳
朱永伟
左敦稳
MING Shun;LI Jun;ZHANG Yuchi;QIU Yang;ZHU Yongwei;ZUO Dunwen(College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China)
出处
《金刚石与磨料磨具工程》
CAS
北大核心
2020年第3期86-90,共5页
Diamond & Abrasives Engineering
基金
江苏省自然科学基金项目(BK20181294)
江苏省“六大人才高峰”高层次人才项目(JXQC–010)
中央高校基本科研业务费专项资金(NS2019028)
中国科学院功能晶体与激光技术重点实验室开放课题(FCLT201803)
研究生创新基地(实验室)开放基金(kfjj20180514)。
关键词
固结磨料抛光
YAG晶体
材料去除率
表面粗糙度
磨粒尺寸
基体硬度
fixed abrasive polishing
yttrium aluminum garnet crystal
material removal rate
surface roughness
abrasive size
matrix hardness
