摘要
针对数字显微镜大幅面图像拼接中图像扫描的问题,设计了用于显微镜图像拼接的数控二维载物台机械结构与控制系统。通过采用二维堆叠式共面结构减少了阿贝误差,提高了系统集成度,同时结合有限元分析方法,对机械结构进行了分析;基于单片机设计了基于高精度光栅尺反馈与PID精密运动控制结合的二维数控平台的闭环位移控制系统,实现了二维移动平台X/Y方向的运动控制;采用双频激光干涉仪对所设计的数控二维载物台进行了标定,建立了运动控制误差补偿模型,提高了系统运动精度。研究结果表明:该结构在10 kg负载下形变为0.229 5μm;经补偿后,在100 mm×100 mm的行程范围内重复定位精度小于±5μm。
Aiming at the problem of scanning the large format image stitched by digital microscope a two dimensional numerical control me chanical structure and control system of stage was designed. The two dimensional stacked coplanar structure was used to reduce the Abbe er ror which improved system integration. Finite element analysis on the mechanical structure was conducted. Controlled by MCU a closed loop displacement control system of the two dimensional numerical control stage based on the combination of grating scale feedback with high precision and PID precision motion control was designed which could achieve motion control of the two dimensional movable stage in the di rections of both X and Y. The dual frequency laser interferometer was used to calibrate the designed numerical control two dimensional stage and the online compensation model of motion control error was established. Therefore motion precision of the system improved. The results indicate that deformation of the structure is 0. 229 5 μm under the load of 10 kg after compensation repetitive positioning accuracy is less than ±5μm in the travel range of 100 mm×100 mm.
作者
苏进
夏豪杰
敖银辉
SU Jin;XIA Hao-jie;AO Yin-hui(College of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China;Research Institute of Hefei University of Technology in Sanshui,Foshan 528100,China;College of Instrument Science and Opto Electronic Engineering,Heifei University of Technology,Hefei 230009,China)
出处
《机电工程》
CAS
北大核心
2019年第9期944-948,共5页
Journal of Mechanical & Electrical Engineering
基金
佛山市科技创新团队项目(2014IT100115)
关键词
显微镜
二维平台
运动控制
误差补偿
microscope
two-dimensional platform
motion control
error compensation
