摘要
研究了铌酸锂晶体在研磨过程中产生的表面损伤层。首先通过激光共聚焦显微镜观察了研磨后晶体的表面形貌,通过原子力显微镜测试了研磨后晶体表面的粗糙度,分别通过角度抛光法及直接抛光层层去除的方法测量了损伤层的深度。分析了损伤层的组成及影响因素,对优化研磨工艺参数、提高研磨效率具有指导意义。
The surface damage layer of lithium niobate crystal induced by grinding was researched. The surface morphology of LN crystal after grinding was observed by laser confocal microscopy,and the atomic force microscope was used to measure the roughness of samples. The depth of the damage layer was described digitally by angle polishing method and direct polishing method which remove the damage layer by layer. The factors,which affecting the surface damage layer of lithium niobate crystal after grinding were analyzed,it can guide the direction to optimize the technology of improving the efficiency and quality.
作者
李清连
孙军
吴婧
张玲
许京军
LI Qing-lian;SUN Jun;WU Jing;ZHANG Ling;XU Jing-jun(School of Physics,Nankai University,Tianjin 300071,China;MOE Key Laboratory of Weak-Light Nonlinear Photonics,Nankai University,Tianjin 300457,China;Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China)
出处
《人工晶体学报》
EI
CAS
北大核心
2019年第5期883-888,共6页
Journal of Synthetic Crystals
基金
国家自然科学基金(61575099)
关键词
铌酸锂晶体
研磨
损伤层
lithium niobate crystal
grinding
subsurface damage
