摘要
掠入射X射线反射(GIXR)由于检测精度高且对检测薄膜的无损伤而被广泛用于薄膜检测和高精度表征。GIXR是一种基于数值拟合的间接检测方法,因此在薄膜微观结构的求解,特别是复杂多层膜膜系的求解过程中对数值优化算法的要求较高。为此提出了基于量子衍生遗传算法(QIGA)的薄膜GIXR拟合求解方法,并基于QIGA对Si单层膜和等周期Mo/Si多层膜的GIXR分别进行拟合求解。结果表明,该方法具有求解速度快、拟合精度高的明显优势,说明QIGA在光学薄膜表征方面有潜在的应用价值。
Grazing incident X-ray reflection（GIXR）is widely used in film detection and high accuracy characterization because of its high detection accuracy and nondestructive measurement.However,it is a kind of indirect measurement method,and therefore it requires a superior numerical optimization algorithm when solving thin film parameters,especially for complicated multilayers.A new method based on quantum-inspired genetic algorithm（QIGA）is proposed to realize GIXR fitting.The proposed algorithm is applied in fitting the GIXR of Si single layers and periodic Mo/Si multilayers.The results indicate that the algorithm based on QIGA has fast solving speed and high fitting precision,and QIGA has potential values in the field of thin film characterization.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2017年第12期131-138,共8页
Chinese Journal of Lasers
基金
国家自然科学基金青年科学基金(61405189)
吉林省科技发展计划(20150101019JC
20170312024ZG)
关键词
薄膜
薄膜表征
量子衍生遗传算法
掠入射X射线反射
thin films
film characterization
quantum-inspired genetic algorithm
grazing incident X-ray reflection
