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High χ polystyrene-b-polycarbonate for next generation lithography 被引量:1

High χ polystyrene-b-polycarbonate for next generation lithography
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摘要 Over the past half century,the semiconductor chips have deeply influenced our everyday life through increasingly sophisticated electronic products.The central driving force underlying the remarkable evolution in semiconductor industry is Moore’s Law,nowadays referring to a doubling of transistor counts per chip every 18 months.Sustaining Moore’s Law is economically beneficial;while the manufacturing cost per chip has been held constant, Over the past half century,the semiconductor chips have deeply influenced our everyday life through increasingly sophisticated electronic products.The central driving force underlying the remarkable evolution in semiconductor industry is Moore’s Law,nowadays referring to a doubling of transistor counts per chip every 18 months.Sustaining Moore’s Law is economically beneficial;while the manufacturing cost per chip has been held constant,integrating smaller and denser transistors reduces the cost per
作者 Lei Wan
机构地区 HGST
出处 《Science China Chemistry》 SCIE EI CAS CSCD 2017年第6期679-680,共2页 中国科学(化学英文版)
关键词 lithography High polystyrene sophisticated economically transistor deeply everyday doubling nowadays 下一代光刻 半导体芯片 半导体行业 晶体管数量 电子产品 制造成本 驱动力
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