摘要
为了实验验证此前通过仿真验证的基于六端口反射计的新型BAW传感器读出电路的方案的可行性,本文制作了新型BAW传感器读出电路并对其进行了测试。以串联谐振频率约为1.5 GHz的薄膜体声波谐振器(FBAR)为待测器件(DUT),设计、制作了一种能够满足该FBAR谐振频率测量带宽(1.3 GHz^1.7 GHz)要求的PCB上微带六端口网络和检波器,配合射频信号发生器和示波器,获得了模拟DUT(50ΩSMA匹配负载)的反射系数-频率(Γ-f)曲线测量结果。与矢量网络分析仪(VNA)的测量结果进行了对比,两者吻合较好,实验验证了"基于六端口反射计的BAW传感器读出电路"可用于FBAR谐振频率的测量。本文工作对实用化BAW传感器的研制和片上矢量网络分析仪(VNA-on-Chip)的设计都有借鉴意义。
In order to experimentally verify the feasibility of the scheme of the new BAW sensor readout circuit based on six-port reflector,a new type of BAW sensor readout circuit was fabricated and tested. The film bulk acoustic resonator（FBAR）with series resonant frequency is about 1.5 GHz is the device under tes（tDUT）. Microstrip six port network and detector on PCB are designed and fabricated,which can meet the requirements of FBAR resonant frequency measurement bandwidth（1.3 GHz^1.7 GHz）. Measurement result of the reflection coefficient frequency（Γ-f）curve of the simulated DUT（50 Ω SMA matched load）is obtained by using radio frequency signal generator and oscilloscope. The measurement result from six-port reflectometer is quite consistent with the measurement result from vector network analyzer（VNA）.Thus the scheme that＂the BAW sensor readout circuit based on six-port reflectometer＂can be used for the measurement of FBAR resonant frequency is verified by experiment. The work reported is useful for the practical BAW sensor development and the vector network analyzer on the chip（VNA-on-chip）design.
出处
《传感技术学报》
CAS
CSCD
北大核心
2016年第12期1822-1826,共5页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金项目(61574131)
中国工程物理研究院超精密加工技术重点实验室基金项目(2014ZA001)
核探测与核电子学国家重点实验室开放课题基金项目(2016KF02)
西南科技大学特殊环境机器人技术四川省重点实验室开放基金项目(14zxtk01)
关键词
BAW传感器
薄膜体声波谐振器
读出电路
六端口网络
六端口反射计
矢量网络分析仪
bulk acoustic wave（BAW）sensor
thin-film bulk acoustic wave resonator（FBAR）
read-out circuit
sixport network
six-port reflectometer
vector network analyzer
