摘要
针对金刚石复合片的超精密加工难题,基于正交试验法优化金刚石复合片ELID精密磨削参数组合,采用极差分析得到了各因素对加工质量的影响程度大小,并以此为基础进行了工艺实验。根据金刚石复合片磨削加工后的SEM电镜扫描图,对其表面磨削机理及加工表面典型缺陷进行了分析。研究表明,金刚石复合片的ELID精密磨削最优参数为磨削深度为0.3μm、主轴转速1500r/min、占空比40%、工件移动速度为0.25mm/s、电解电压25V、电极间隙1mm。采用优化后的参数组合进行磨削加工,获得了粗糙度为0.019μm的加工表面。
In view of PDC ultra-precision processing problem,orthogonal test method is based on the PDC ELID precision grinding combination of parameters to be optimized. Through range analysis,we obtained the degree of influence of various factors on the processing quality,and as a basis for the experimental study of the process. Then,based PDC SEM surface plot,analyzed its surface grinding mechanism and typical machined surface defects. Research showsoptimal parameters of PDC ELID precision grinding is： cutting depth of 0. 3 m,spindle speed of 1500 r / min,40% duty cycle,the moving speed of the sample is 0. 25 mm / s,the electrolysis voltage of 25 V,the electrode gap 1mm. Using a combination of the optimized parameters of PDC were grinding to obtain a roughness of the machined surface 0. 019μm.
出处
《工具技术》
北大核心
2016年第11期34-37,共4页
Tool Engineering
