摘要
温度误差和非线性误差是影响MEMS加速度计精度、限制其应用领域的两个重要因素。研究了国内外MEMS加速度计误差补偿方法,分析了MEMS加速度计的温度误差和非线性误差来源。为了消除一款50g量程的数字式MEMS加速度计的误差,采用分段线性拟合插值法进行了零偏温度补偿;同时采用基于预测模型的分段插值法对加速度计的非线性误差进行了校正。测试结果表明,经过补偿后,加速度计全温区(-40℃~60℃)零偏变化量从33.95mg提升到了1.02mg,标度因数温度系数从4.205×10^(-5)/℃提升到了0.74×10^(-6)/℃,满量程非线性度从1.010 022×10^(-2)提升到了1.479 9×10^(-4)。该方法算法简单,效果显著,适合于工程应用。
The temperature error and nonlinearity error are two key factors to affect the accuracy of a MEMS accelerometer and restrain its application fields.The methods of the error compensation for MEMS accelerometers at home and abroad were studied and the origins of the temperature error and nonlinearity error for MEMS accelerometers were analyzed.In order to eliminate the error of a 50 gdigital MEMS accelerometer,the method of interpolation and linear fitting in fragmented region was used for the temperature compensation,and the interpolation method in fragmented region based on predictive model was used for nonlinearity error correction.The test result shows that the zero bias change in the accelerometer over temperature range（-40 ℃-60 ℃）is improved from33.95 mgto 1.02 mg,the temperature coefficient of the scale factor is improved from4.205×10^（-5）/℃ to 0.74×10^（-6）/℃,and the full scale nonlinearity is improved from1.010 022×10^（-2 ）to 1.479 9×10^（-4）.This method is simple and effective and suitable for engineering application.
出处
《微纳电子技术》
北大核心
2016年第7期467-472,共6页
Micronanoelectronic Technology
关键词
微电子机械系统(MEMS)
加速度计
温度补偿
非线性补偿
插值法
micro-electromechanical system（MEMS）
accelerometer
temperature compensa tion
nonlinearity compensation
interpolation method
