摘要
近年来,飞秒激光微纳加工技术引起了科学界的广泛关注.飞秒激光脉冲凭借其超短脉宽及超强的瞬时功率,较传统的激光加工有着明显的优势:几乎可以加工任何材料,非接触加工,非热加工,加工精度高,能够加工亚微米级结构和三维复杂结构,加工过程耗能低.飞秒激光加工材料的过程中会产生周期性的表面结构,这些表面结构会对材料的表面性能产生明显的影响,并且在国防、医疗、高端制造等多个领域具有巨大的应用潜力.因此,国内外研究人员对飞秒激光诱导周期性表面结构进行了系统深入的理论研究和实验研究.本文简要阐述了飞秒激光的基本特点及飞秒激光微纳加工的独特优势,对近年来关于飞秒激光诱导周期性表面结构(laser induced periodic surface structure,LIPSS)的理论与实验研究进行了综述,并阐述了这种周期性表面结构对材料表面浸润特性、光学特性以及表面拉曼增强的影响和研究进展,最后对LIPSS未来的研究方向进行了预测和展望.
In recent years, femtosecond laser micro/nano fabrication has attracted much interest. With ultrahigh power intensities and ultrashort irradiation periods, femtosecond laser presents unique advantages over conventional laser. Femtosecond laser machining can greatly reduce the heat-affected zone, microcracks and recast layer when it interacts with materials, which changes the physical and chemical mechanisms of laser-material interaction basically. Almost all materials can be manufactured by femtosecond laser via a noncontact and nonthermal process. In addition, femtosecond laser machining can break through the optical diffraction limit as a result of the nonlinear multi-photon effect occurred when it processes materials, which improves the precision significantly. Both sub-micron structures and three dimensional complex structures can be fabricated by femtosecond laser high-precision low-energy-consumption processing. In short, femtosecond laser presents unique advantages in the field of micro/nano manufacturing. The pulse width of femtosecond laser is usually shorter than or equal to the characteristic time of most of the physical/chemical processes, so that a series of interesting phenomena are induced through controlling the local transient electrons dynamics during the processing. Periodic surface micro/nano structures, which have significant effects on the surface properties of the materials, have been observed on almost all materials including metals, dielectrics, semiconductors and so on during femtosecond laser machining. Many researchers have carried out theoretical and experimental studies on femtosecond laser-induced periodic surface structures（LIPSS）, such as ripples, quasi-periodic conical structures, regularly arranged nano-column structures and so on, due to their great applied potentialities in national defense, medical treatment, top-end manufacture and other fields. In this paper, we summarized the distinct advantages of femtosecond laser micro/nano machining and made main contents on the femtosecond laser-induced periodic surface structures（LIPSS） as follows. Above all, we briefly elaborated the fundamental characteristics of femtosecond laser and its distinct advantages in machining in the introduction. Additionally, we brought forward LIPSS and expounded its great applied potentialities in the field of manufacture and other kinds of researches. Then in the first part of the main body, we summarized the theoretical and experimental results on LIPSS since ripple was discovered by Birnbaum firstly. In the aspect of theoretical research, we summarized some representative results relevant to ripple mainly. And in the second part, we showed some representative results about the interesting surface properties improvement caused by periodic surface micro/nano structures in the past decades, such as wettability, optical properties and surface-enhanced Raman scattering（SERS）. In the end, the future research directions of femtosecond laser-induced surface micro/nano structures were prospected. The combination of experimental research and theoretical analysis has become a trend in these years. With the improvement of femtosecond laser micro/nano fabrication and the development of research on the periodic surface micro/nano structures, in the near future, LIPSS will be widely applied in the practical industrial fields including national defense, automotive, medical, aerospace, top-end manufacture and so on.
出处
《科学通报》
EI
CAS
CSCD
北大核心
2016年第14期1560-1573,共14页
Chinese Science Bulletin
基金
国家重点基础研究发展计划(2011CB013000)
国家自然科学基金(91323301,51322511)
教育部科技创新工程重大项目培育资金(708018)资助
关键词
飞秒激光
周期性表面结构
微纳加工
表面浸润特性
表面光学特性
表面拉曼增强
femtosecond laser
laser-induced periodic surface structures（LIPSS）
micro/nano fabrication
surface wettability
surface optical properties
surface-enhanced Raman scattering（SERS）
