摘要
提出了基于声音激励和频域光学相干层析的声激励频域光学相干振动层析(AE-OCVT)系统,并研究其在微型悬臂梁非接触式振动检测和模态分析中的应用。AE-OCVT系统利用声波信号激励微梁,再对微梁受到声波激励产生的振动进行测量,可以实现微梁结构的非接触式无损振动检测,优于传统的接触式检测法。为了解决由于时域光谱干涉信号非线性导致频域周期信号被展宽的问题以及对信号作傅里叶变换过程中时域信号加窗截断产生能量泄露的问题,分别采用光谱波长标定算法和频谱校正算法来校正误差。经过误差校正后,系统具有很高的位移探测精度,轴向分辨率可达亚纳米量级。本研究将有助于微结构的振动检测和模态分析,对微电子机械系统(MEMS)设计具有重要意义。
An frequency-domain optical coherence vibration tomography(AE-OCVT) system based on acoustic excitation and optical coherence tomography is proposed. Its applications in the non-contact structural vibration detection and modal analysis of microbeams are also studied. The AE-OCVT system utilizes the acoustic signal with different frequency and amplitude to excite the microbeams. Then, the vibration of the microbeam is measured. In this way, the non-contact and nondestructive vibration detection to the microbeam structure by the developed AE-OCVT system can be carried out. It is better than the conventional method based on the contact detection. To address the problem, the periodic signal in frequency domain is broadened due to the nonlinearity of time domain spectral interference signals and the energy leakage from the time domain signal with window truncation during Fourier transform of the spectral signal. The spectral wavelength calibration algorithm and the spectrum correction algorithm are utilized. After the error correction, the AE-OCVT system has ultra-precision displacement detection accuracy. The axial resolution can reach the sub-nanometer level. This work will be helpful for vibration detection and modal analysis of microstructures, which is of great significance to the design of micro-electromechanical systems(MEMS).
作者
周宁
钟舜聪
张秋坤
钟剑锋
林杰文
Zhou Ning;Zhong Shuncong;Zhang Qiukun;Zhong Jianfeng;Lin Jiewen(School of Mechanical Engineering and Automation,Fuzhou University,Fuzhou 350108,China;School of Mechatronics Engineering and Automation,Shanghai University,Shanghai 200433,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2018年第12期47-54,共8页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金(51675103)
机械系统与振动国家重点实验室开放课题(MSV-2018-07)
上海市自然科学基金(18ZR1414200)
福建省质量技术监督局科技计划(FJQI2012028)项目资助.
关键词
声激励
光学相干层析
微悬臂梁
误差校正
非接触振动检测
acoustic excitation
optical coherence tomography
microbeams
error correction
non-contact vibration detection
