摘要
应用相移干涉及Zernike多项式波面拟合技术实现对空间小角度的高精度测量 ,测量精度可达到 0 0 13″。与采用自准直仪、激光干涉小角度测量仪的测量方法相比较 ,测量精度有较大幅度的提高。与测长设备 光栅尺结合使用 。
The small angle measurement accuracy can be 0 013″ by a novel technology of phase shift interferometry and Zernike polynomial to fit wavefront. The measurement accuracy can be improved largely compared with the typical angle measurement,such as using self collimator and laser interferometer for angle measurement . Moreover, with application of length measurement device (linear encoder), the linearity of pitch and roll for the guide way can be measured with a high accuracy at the same time.
出处
《计量学报》
CSCD
北大核心
2002年第1期6-9,共4页
Acta Metrologica Sinica
